Abstract: A thermal management system for a substrate processing tool located in a fabrication room includes a blower that draws air from the fabrication room and causes the air to flow through a process module of the substrate processing tool. Heat is transferred from the process module to the air and the air is exhausted from the process module. A heat exchanger receives the air exhausted from the process module, cools the air, and provides the cooled air to at least one of the fabrication room, a subfloor of the fabrication room, and the process module.

Abstract: A method and apparatus for thermally treating a substrate is provided. A thermal treatment chamber has a substrate support and a magnetically permeable rotor housed in a rotor well. An annular cover shields the rotor from the processing environment. The annular cover has a thermal stress relief joint formed therein that provides one or more mechanical degrees of freedom to allow portions of the cover to shift with thermal stresses. In one embodiment, a gap is formed in the annular cover at the point of maximum thermal stress.

Abstract: A device for storing food products in combination with a component, such as a plate or a bowl, such that a visual indication of secure engagement is provided and the device does not require a specific corresponding mating structure in order to provide an air-tight seal between said device and the component.

Abstract: A method and apparatus for thermally treating a substrate is provided. A thermal treatment chamber has a substrate support and a magnetically permeable rotor housed in a rotor well. An annular cover shields the rotor from the processing environment. The annular cover has a thermal stress relief joint formed therein that provides one or more mechanical degrees of freedom to allow portions of the cover to shift with thermal stresses. In one embodiment, a gap is formed in the annular cover at the point of maximum thermal stress.

Abstract: A carrier head has a base, a flexible membrane, and a valve in the carrier head that forms part of a substrate detection system. The valve includes a valve stem that contacts an upper surface of the flexible membrane so that if a substrate is attached to the lower surface of the flexible membrane when the first chamber is evacuated, the valve is actuated to generate a signal to the substrate detection system.