Abstract: A thermal management system for a substrate processing tool located in a fabrication room includes a blower that draws air from the fabrication room and causes the air to flow through a process module of the substrate processing tool. Heat is transferred from the process module to the air and the air is exhausted from the process module. A heat exchanger receives the air exhausted from the process module, cools the air, and provides the cooled air to at least one of the fabrication room, a subfloor of the fabrication room, and the process module.

Abstract: Embodiments of the present invention provide apparatus and method for improving gas distribution during thermal processing. One embodiment of the present invention provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support is configured to support and rotate the substrate, a gas inlet assembly coupled to an inlet of the chamber body and configured to provide a first gas flow to the processing volume, and an exhaust assembly coupled to an outlet of the chamber body, wherein the gas inlet assembly and the exhaust assembly are disposed on opposite sides of the chamber body, and the exhaust assembly defines an exhaust volume configured to extend the processing volume.

Abstract: Embodiments of the present invention provide apparatus and method for improving gas distribution during thermal processing. One embodiment of the present invention provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support is configured to support and rotate the substrate, a gas inlet assembly coupled to an inlet of the chamber body and configured to provide a first gas flow to the processing volume, and an exhaust assembly coupled to an outlet of the chamber body, wherein the gas inlet assembly and the exhaust assembly are disposed on opposite sides of the chamber body, and the exhaust assembly defines an exhaust volume configured to extend the processing volume.

Abstract: Embodiments of the present invention provide apparatus and method for improving gas distribution during thermal processing. One embodiment of the present invention provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support is configured to support and rotate the substrate, a gas inlet assembly coupled to an inlet of the chamber body and configured to provide a first gas flow to the processing volume, and an exhaust assembly coupled to an outlet of the chamber body, wherein the gas inlet assembly and the exhaust assembly are disposed on opposite sides of the chamber body, and the exhaust assembly defines an exhaust volume configured to extend the processing volume.

Abstract: A method and apparatus for thermally treating a substrate is provided. A thermal treatment chamber has a substrate support and a magnetically permeable rotor housed in a rotor well. An annular cover shields the rotor from the processing environment. The annular cover has a thermal stress relief joint formed therein that provides one or more mechanical degrees of freedom to allow portions of the cover to shift with thermal stresses. In one embodiment, a gap is formed in the annular cover at the point of maximum thermal stress.

Abstract: A device for storing food products in combination with a component, such as a plate or a bowl, such that a visual indication of secure engagement is provided and the device does not require a specific corresponding mating structure in order to provide an air-tight seal between said device and the component.

Abstract: Embodiments of the present invention provide apparatus and method for improving gas distribution during thermal processing. One embodiment of the present invention provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support is configured to support and rotate the substrate, a gas inlet assembly coupled to an inlet of the chamber body and configured to provide a first gas flow to the processing volume, and an exhaust assembly coupled to an outlet of the chamber body, wherein the gas inlet assembly and the exhaust assembly are disposed on opposite sides of the chamber body, and the exhaust assembly defines an exhaust volume configured to extend the processing volume.

Abstract: Embodiments of the present invention provide apparatus and method for improving gas distribution during thermal processing. One embodiment of the present invention provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support is configured to support and rotate the substrate, a gas inlet assembly coupled to an inlet of the chamber body and configured to provide a first gas flow to the processing volume, and an exhaust assembly coupled to an outlet of the chamber body, wherein the gas inlet assembly and the exhaust assembly are disposed on opposite sides of the chamber body, and the exhaust assembly defines an exhaust volume configured to extend the processing volume.

Abstract: A method and apparatus for thermally treating a substrate is provided. A thermal treatment chamber has a substrate support and a magnetically permeable rotor housed in a rotor well. An annular cover shields the rotor from the processing environment. The annular cover has a thermal stress relief joint formed therein that provides one or more mechanical degrees of freedom to allow portions of the cover to shift with thermal stresses. In one embodiment, a gap is formed in the annular cover at the point of maximum thermal stress.

Abstract: Embodiments of the present invention provide apparatus and method for improving gas distribution during thermal processing. One embodiment of the present invention provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support is configured to support and rotate the substrate, a gas inlet assembly coupled to an inlet of the chamber body and configured to provide a first gas flow to the processing volume, and an exhaust assembly coupled to an outlet of the chamber body, wherein the gas inlet assembly and the exhaust assembly are disposed on opposite sides of the chamber body, and the exhaust assembly defines an exhaust volume configured to extend the processing volume.

Abstract: A carrier head has a base, a flexible membrane, and a valve in the carrier head that forms part of a substrate detection system. The valve includes a valve stem that contacts an upper surface of the flexible membrane so that if a substrate is attached to the lower surface of the flexible membrane when the first chamber is evacuated, the valve is actuated to generate a signal to the substrate detection system.

Abstract: This relates to an improved skin engaging member for use in razor blade; cartridge assemblies and shaving systems of the wet shave type. In an embodiment, there is provided a two-component, control-release shaving device consisting of(a) a sheath layer made from thermoplastic resins with openings therein and (b) a core region containing internal shaving aids. Potentially, the device can maintain surface appearance, control-release the shaving aids, minimize the degradation of the shaving aids, and prevent the shaving aids from being trapping in a strip. Furthermore, the addition of low-melt additives to the shaving aids becomes feasible and the compatibility between the shaving aids and the shaving aid carrier such as polystyrene in the lubricating strip composite becomes less critical.

Abstract: Monofilament gel dental flosses and methods for their fabrication are provided. The gel flosses comprise a core material in combination with a gel material, where both the core and gel materials comprise thermoplastic elastomeric polymers and are sufficiently adherent to one another so as not to separate under conditions of hygienic use.

Abstract: A shaving system that includes a housing, one or more blades mounted on the housing, a cap behind the blades on the housing, and a guard structure in front of the blades on the housing, the guard structure including flexible skin-engaging protrusions that engage a user's skin in front of the blades and a water leachable shaving aid composite positioned to deliver a shaving aid to the skin behind the flexible skin-engaging protrusions.

Abstract: Improved dental flosses include two or more components selected to provide desired properties to the floss. The improved flosses may comprise one or a plurality of multicomponent filaments, each filament including an inner core selected to provide strength to the floss, and an outer layer selected to provide a desired surface property. The improved flosses also may comprise one or a plurality of core filaments embedded in a single body sheath. The filament component provides desirable physical properties to the floss, such as tensile strength, while a floss body sheath component provides desirable surface properties.

Abstract: A shaving system that includes a housing, one or more blades mounted on the housing, a cap behind the blades on the housing, and a guard structure in front of the blades on the housing, the guard structure including flexible skin-engaging protrusions that engage a user's skin in front of the blades and a water leachable shaving aid composite positioned to deliver a shaving aid to the skin behind the flexible skin-engaging protrusions.

Abstract: The present invention is directed to a shaving system of the wet shave type comprising a blade member (one or more) and a structure which supports or holds the blade member and which has an external skin engaging portion in proximity to the blade member. The skin engaging portion includes an improved shaving aid composite (or lubricating strip) which contains an inclusion complex of a skin-soothing agent, such as menthol, with a cyclodextrin. Preferably the shaving aid composite comprises a matrix of a water-insoluble polymer, an effective amount of a skin lubricating water-soluble polymer dispersed within the matrix, and an inclusion complex of a skin-soothing agent with a cyclodextrin. Alternatively, the shaving aid composite may comprise a sheath of water-insoluble polymer that surrounds a core which includes a skin-lubricating water-soluble polymer and an inclusion complex of a skin-soothing agent with a cyclodextrin.