Patents by Inventor Michael Ulrickson

Michael Ulrickson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6356618
    Abstract: An extreme ultraviolet and soft x-ray radiation electric capillary discharge source that includes a boron nitride housing defining a capillary bore that is positioned between two electrodes one of which is connected to a source of electric potential can generate a high EUV and soft x-ray radiation flux from the capillary bore outlet with minimal debris. The electrode that is positioned adjacent the capillary bore outlet is typically grounded. Pyrolytic boron nitride, highly oriented pyrolytic boron nitride, and cubic boron nitride are particularly suited. The boron nitride capillary bore can be configured as an insert that is encased in an exterior housing that is constructed of a thermally conductive material. Positioning the ground electrode sufficiently close to the capillary bore outlet also reduces bore erosion.
    Type: Grant
    Filed: June 13, 2000
    Date of Patent: March 12, 2002
    Assignee: EUV LLC
    Inventors: Neal R. Fornaciari, Richard E. Nygren, Michael A. Ulrickson
  • Patent number: 4650632
    Abstract: In a magnetic plasma confinment device having an inner toroidal limiter mounted on an inner wall of a plasma containment vessel, an arrangement is provided for monitoring vertical temperature profiles of the limiter. The temperature profiles are taken at brief time intervals, in a time scan fashion. The time scans of the vertical temperature profile are continuously monitored to detect the presence of a peaked temperature excursion, which, according to the present invention, is a precursor of a subsequent major plasma disruption. A fast scan of the temperature profile is made so as to provide a time interval in real time prior to the major plasma disruption, such that corrective action can be taken to reduce the harmful effects of the plasma disruption.
    Type: Grant
    Filed: April 16, 1984
    Date of Patent: March 17, 1987
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventors: Henry W. Kugel, Michael Ulrickson
  • Patent number: 4607963
    Abstract: A device for measuring the two-dimensional temperature profile of a surface comprises imaging optics for generating an image of the light radiating from the surface; an infrared detector array having a plurality of detectors; and a light pipe array positioned between the imaging optics and the detector array for sampling, transmitting, and distributing the image over the detector surfaces. The light pipe array includes one light pipe for each detector in the detector array.
    Type: Grant
    Filed: March 8, 1983
    Date of Patent: August 26, 1986
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventor: Michael A. Ulrickson