Patents by Inventor Michael Van Der Veen

Michael Van Der Veen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program
    Patent number: 7480028
    Abstract: The invention is directed to enabling substrate identification by comparing the measured distance between two features on an unidentified substrate with one or more stored distances. The one or more stored distances are the distances intended during the design of one or more substrates. The unidentified substrate is identified by a stored distance that corresponds to the measured distance. The two features are selected from a plurality of features that may be placed on a back side or a front side of a substrate. An optical system is provided for reading the features from the back side or a front side of the substrate.
    Type: Grant
    Filed: March 2, 2005
    Date of Patent: January 20, 2009
    Assignee: ASML Netherlands B.V.
    Inventors: Michael Van Der Veen, Anastasius Jacobus Anicetus Bruinsma, Henricus Wilhelmus Maria Van Buel, Jacob Fredrik Friso Klinkhamer, Martinus Hendrikus Antonius Leenders, Christianus Gerardus Maria De Mol, Hubert Adriaan Van Mierlo
  • Lithographic apparatus, method of substrate identification, device manufacturing method, substrate, and computer program
    Publication number: 20050195378
    Abstract: In a method according to an embodiment of the invention, substrate identification is performed by comparing the measured distance between two features on an unidentified substrate with one or more stored distances. The one or more stored distances are the distances intended during the design of one or more substrates. The unidentified substrate is identified by a stored distance that corresponds to the measured distance.
    Type: Application
    Filed: March 2, 2004
    Publication date: September 8, 2005
    Applicant: ASML Netherlands B.V.
    Inventors: Michael Van Der Veen, Christianus De Mol