Patents by Inventor Michael Veen

Michael Veen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program
    Publication number: 20050248740
    Abstract: The invention is directed to enabling substrate identification by comparing the measured distance between two features on an unidentified substrate with one or more stored distances. The one or more stored distances are the distances intended during the design of one or more substrates. The unidentified substrate is identified by a stored distance that corresponds to the measured distance. The two features are selected from a plurality of features that may be placed on a back side or a front side of a substrate. An optical system is provided for reading the features from the back side or a front side of the substrate.
    Type: Application
    Filed: March 2, 2005
    Publication date: November 10, 2005
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Michael Veen, Anastasius Bruinsma, Henricus Van Buel, Jacob Klinkhamer, Martinus Leenders, Christianus Mol, Hubert Mierlo