Patents by Inventor Michael Vergöhl

Michael Vergöhl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230067917
    Abstract: The invention relates to a device and a method for producing layers whose layer thickness distribution can be adjusted in coating systems with horizontally rotating substrate. A very homogeneous or a specific non-homogeneous distribution can be adjusted. The particle loading is also significantly reduced. The service life is significantly higher compared to other methods. Forming of parasitic coatings is reduced.
    Type: Application
    Filed: February 12, 2021
    Publication date: March 2, 2023
    Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
    Inventors: Michael VERGÖHL, Andreas PFLUG, Tobias ZICKENROTT, Stefan BRUNS
  • Publication number: 20220213591
    Abstract: According to the invention, a device is provided for coating substrates having planar or shaped surfaces by means of magnetron sputtering, by means of which device surfaces having any shape, for examples lenses, aspheres or freeform surfaces which have an adjustable layer-thickness profile, can be coated such that a layer function is maintained on the substantially complete surface. A method for coating substrates having planar or shaped surfaces by means of magnetron sputtering is also provided.
    Type: Application
    Filed: April 9, 2020
    Publication date: July 7, 2022
    Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E. V.
    Inventors: Michael VERGÖHL, Andreas PFLUG, Stefan BRUNS, André KAISER, Thomas MELZIG, Tobias ZICKENROTT
  • Publication number: 20210164092
    Abstract: The invention relates to a device and a method for producing layers with very good uniformity in coating systems with horizontally rotating substrate guiding. Alternatively, certain layer thickness gradients can be set. The particle loading is also significantly reduced. The service life is much higher compared to other methods. Parasitic coatings are reduced. The coating rate is also increased.
    Type: Application
    Filed: August 9, 2019
    Publication date: June 3, 2021
    Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E. V.
    Inventors: Michael VERGÖHL, Andreas PFLUG, Stefan BRUNS, Tobias ZICKENROTT
  • Publication number: 20180136369
    Abstract: A coated object and a method for producing a coated object are disclosed. In an embodiment, the coated object includes a substrate and an optical coating disposed on the substrate, wherein the optical coating includes a reflection-reducing layer sequence, which includes a covering layer with a refractive index nA and at least one diamond layer with a refractive index nD1>nA, wherein the diamond layer is disposed between the covering layer and the substrate and includes diamond crystals, and wherein the diamond layer has a layer thickness of less than 500 nm.
    Type: Application
    Filed: April 13, 2016
    Publication date: May 17, 2018
    Inventors: Michael Vergöhl, Stefan Bruns, Hans-Ulrich Kricheldorf, Lothar Schäfer, Markus Höfer, Markus Armgardt
  • Publication number: 20170371224
    Abstract: The invention relates to an electrically controlled interference colour filter comprising at least two transparent electrodes, at least one nematic liquid crystal layer and alignment layers for alignment of the liquid crystals. When an electrical field is applied the liquid crystals can be realigned and thus the transmission wavelength range of the interference colour filter can be shifted.
    Type: Application
    Filed: December 13, 2015
    Publication date: December 28, 2017
    Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
    Inventors: Arno SEEBOTH, Detlef LÖTZSCH, Christian RABE, Peter FRACH, Matthias GITTNER, Hagen BARTZSCH, René DE LA BARRÉ, Roland BARTMANN, Michael VERGÖHL, Stefan BRUNS, Thomas NEUBERT, Johanna FISCHER, Gerhard SCHOTTNER
  • Patent number: 9803276
    Abstract: The invention relates to methods and devices for producing one or more low-particle layers on substrates in a vacuum. The layers are deposited onto the substrate from a cylindrical source material, optionally together with a reactive gas component, by means of magnetron sputtering. The layer is deposited against the force of gravity in a sputter-up method. During the method or within the device, the structure or stochiometric atomic composition of the layers can optionally be modified using a plasma source. Multiple sputtering sources with different source materials can be provided in the device such that multiple layers of different compositions can be applied on the substrate at a high speed in one process.
    Type: Grant
    Filed: July 23, 2012
    Date of Patent: October 31, 2017
    Assignee: FRAUNHOER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSHUNG E.V.
    Inventors: Michael Vergöhl, Daniel Rademacher, Hans-Ulrich Kricheldorf, Günter Bräuer
  • Publication number: 20160254127
    Abstract: The invention relates to the deposition of optical precision films with high uniformity, precision, particle freedom and low absorption on the substrate. For this purpose, a method and a device are proposed. The approach is the use of target materials and also possibly of surfaces in the sputtering field. Particularly high uniformity and also particularly low residual absorption are achieved with these materials. The invention is suitable for the production of optical thin-film filters, as are used for example in laser material machining, laser components, optical sensors for measuring technology, or in medical diagnostics.
    Type: Application
    Filed: October 16, 2014
    Publication date: September 1, 2016
    Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
    Inventors: Michael VERGÖHL, Daniel RADEMACHER, Tobias ZICKENROTT
  • Publication number: 20140262752
    Abstract: The invention relates to methods and devices for producing one or more low-particle layers on substrates in a vacuum. The layers are deposited onto the substrate from a cylindrical source material, optionally together with a reactive gas component, by means of magnetron sputtering. The layer is deposited against the force of gravity in a sputter-up method. During the method or within the device, the structure or stochiometric atomic composition of the layers can optionally be modified using a plasma source. Multiple sputtering sources with different source materials can be provided in the device such that multiple layers of different compositions can be applied on the substrate at a high speed in one process.
    Type: Application
    Filed: July 23, 2012
    Publication date: September 18, 2014
    Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
    Inventors: Michael Vergöhl, Daniel Rademacher, Hans-Ulrich Kricheldorf, Günter Bräuer
  • Publication number: 20140233106
    Abstract: An object with reflection-reducing coating includes a substrate and a coating arranged on the substrate. The coating is multilayered and includes an outer layer having a refractive index n1 and at least one second sub-layer with a refractive index n2 which is adjacent to the outer layer. n2>n1+0.4, and the outer layer possesses a refractive index n1>1.50 and a layer hardness greater than 8 GPa.
    Type: Application
    Filed: February 21, 2013
    Publication date: August 21, 2014
    Inventors: Michael VERGOEHL, Daniel RADEMACHER, Oliver LENK, Stefan BRUNS, Thomas NEUBERT, Peter WEISS
  • Patent number: 8345228
    Abstract: A measuring device for quantitative determination of optical characteristic values for detecting photo- and/or electrochemical decomposition reactions taking place on surfaces of photocatalytically active substrates.
    Type: Grant
    Filed: June 25, 2007
    Date of Patent: January 1, 2013
    Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
    Inventors: Frank Neumann, Thomas Neubert, Michael Vergöhl
  • Patent number: 7985489
    Abstract: The invention relates to a layered system of a component that can be thermally stressed, comprising at least one for expanding the application scope of layered systems and in particular for improving their life cycle. Said layer has at least one first and at least one second material and a mixture profile (1) that varies at least almost continuously with the layer thickness, without forming a boundary layer between the first and second material.
    Type: Grant
    Filed: May 22, 2008
    Date of Patent: July 26, 2011
    Assignee: Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V
    Inventors: Michael Vergöhl, Christoph Rickers, Frank Neumann, Christina Polenzky
  • Publication number: 20110111131
    Abstract: A method for producing layer systems on substrates includes irradiating a first vacuum coating source with an irradiating source. The first vacuum coating source includes a first layer material that is dissolved in a solvent. A second vacuum coating source is applied to the substrate via a chemical vapor deposition process. In this way, novel layer systems and mixed layers, in particular mixed layers of polymers and metals or metal oxides can be applied.
    Type: Application
    Filed: March 27, 2008
    Publication date: May 12, 2011
    Applicant: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
    Inventors: Michael Vergöhl, Thomas Neubert
  • Publication number: 20100182590
    Abstract: A measuring device for quantitative determination of optical characteristic values for detecting photo- and/or electrochemical decomposition reactions taking place on surfaces of photocatalytically active substrates.
    Type: Application
    Filed: June 25, 2007
    Publication date: July 22, 2010
    Applicant: Fraunhofer-Gesellschaft zur Fordenrung der angewandten Forschung e.V.
    Inventors: Frank Neumann, Thomas Neubert, Michael Vergöhl
  • Patent number: 7550208
    Abstract: Transparent, temperature-stable coatings based on titanium oxide with a high refractive index and improved thermal and mechanical properties comprise titanium oxide with at least one additive from the group comprising aluminum and/or aluminum oxide, whereby the proportion of Al atoms in the coating, with reference to the total number of metal atoms in the coating is in the range from 2 to 4%.
    Type: Grant
    Filed: January 21, 2004
    Date of Patent: June 23, 2009
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Arnd Ritz, Michael Vergöhl, Berno Hunsche
  • Patent number: 7521871
    Abstract: High temperature-resistant transparent coatings based on zirconium oxide, which have improved dispersion properties and a high refractive index, comprise zirconium oxide with at least one additive from the group consisting of tantalum and/or tantalum oxide, whereby the proportion of Ta atoms, in relation to the total number of metal atoms in the coating is in the range of 5 to 30%.
    Type: Grant
    Filed: January 21, 2004
    Date of Patent: April 21, 2009
    Assignee: Koninklijke Philips Electronics, N.V.
    Inventors: Arnd Ritz, Michael Vergöhl, Berno Hunsche
  • Publication number: 20060257669
    Abstract: The invention relates to a method of producing titanium oxide coatings and also to articles, in particular lamps, lights or optical elements having said coating. In order to develop a method of the generic type such that the coating with rutile is considerably simplified, and to be able to carry it out at lower process temperatures, and also to find suitable surfaces for coating in this way, the invention proposes that the coating be deposited, with the rutile structure being obtained, on the surface of the substrate that is to be coated, at an oxygen partial pressure p which can be defined, by sputtering, at a deposition temperature of 100 to 300° C. from a titanium target.
    Type: Application
    Filed: January 21, 2004
    Publication date: November 16, 2006
    Inventors: Arnd Ritz, Michael Vergöhl, Berno Husche