Abstract: Multiple beamlet laser beam delivery systems and methods may be used in laser machining systems and methods to machine multiple regions on a workpiece simultaneously. One embodiment of a laser machining system and method may be used, for example, to scribe one or more lines in large flat workpieces such as solar panels. In particular, laser machining systems and methods may be used to scribe lines in thin film photovoltaic (PV) solar panels with accuracy, high speed and reduced cost. The multiple beam delivery systems may be movable to scribe multiple lines simultaneously in the workpiece.

Abstract: A triple point screen which electrically insulates the high voltage electrode in the discharge region of a gas discharge laser system. The screen is formed from an inorganic dielectric to withstand the corrosive atmosphere of the gas discharge laser. The triple point screen has a grounded conductive metal screen molded into the dielectric and positioned close to the triple point of the anode to substantially reduce the strength of the electric fields at the triple point.

Abstract: An electrode for a discharge region of a transversely purged gas discharge laser. The electrode in a discharge region includes blocks of semiconductor material having widely different dielectric constants configured about the center and ground electrodes of the discharge region. When the electrode is subjected to a quickly changing voltage pulse, the different time constants of the blocks of semiconductor material cause a surface discharge to be generated near the surface of the electrode. This surface discharge preionizes the discharge region. Subsequently, as the semiconductor regions become more resistive, the surface discharge dissipates and the electrodes behaves as a resistively ballasted discharge electrode. An electronic circuit for driving the electrode is also disclosed.