Patents by Inventor Michael Vukelic

Michael Vukelic has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for purifying silicon source material by high gravity rotating packed beds
    Patent number: 8568597
    Abstract: A process is disclosed for purification of silicon source material including trichlorosilane. First, the silicon source material in liquid state with impurities vapor and the other chlorosilane or silane are passing a first high gravity rotating packed bed with porous metal, at a temperature lower than the boiling point of the silicon source material, the impurities vapor and the other chlorosilane or silane are separated from the liquid silicon source material; second, the silicon source material in liquid state is fed to a second high gravity rotating packed bed, oxygen is also fed to the second high gravity rotating packed bed to form impurity-containing siloxane complexes with higher boiling point. Finally distilling to remove the impurity-containing siloxane complexes from the silicon source material.
    Type: Grant
    Filed: May 10, 2010
    Date of Patent: October 29, 2013
    Inventors: Shyang Su, Yi-Heng Su, Michael Vukelic
  • Process for purifying silicon source material by high gravity rotating packed beds
    Publication number: 20110274608
    Abstract: A process is disclosed for purification of silicon source material including trichlorosilane. First, the silicon source material in liquid state with impurities vapor and the other chlorosilane or silane are passing a first high gravity rotating packed bed with spongy metal, at a temperature lower than the boiling point of the silicon source material, the impurities vapor and the other chlorosilane or silane are separated from the liquid silicon source material; second, the silicon source material in liquid state is fed to a second high gravity rotating packed bed, oxygen is also fed to the second high gravity rotating packed bed to form impurity containing siloxane complexes with higher boiling point. Finally distilling to remove the impurity containing siloxane complexes from the silicon source material.
    Type: Application
    Filed: May 10, 2010
    Publication date: November 10, 2011
    Inventors: Shyang Su, Yi-Heng Su, Michael Vukelic
  • Fluid dispersion head
    Patent number: 5286519
    Abstract: A fluid distribution head of this invention includes a chamber for fluid flow including a perforated plate. The perforated plate is internally supported by a structural support to avoid deformation of the plate.
    Type: Grant
    Filed: March 24, 1992
    Date of Patent: February 15, 1994
    Assignee: LSI Logic Corporation
    Inventor: Michael Vukelic
  • Fluid dispersion head for CVD appratus
    Patent number: 5268034
    Abstract: A fluid distribution head of this invention includes a chamber for fluid flow including a perforated plate. The perforated plate is internally supported by a structural support to avoid deformation of the plate.
    Type: Grant
    Filed: March 24, 1992
    Date of Patent: December 7, 1993
    Assignee: LSI Logic Corporation
    Inventor: Michael Vukelic