Patents by Inventor Michael W. Bronko

Michael W. Bronko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device and handling system for measurement of mobility and sheet charge density
    Patent number: 8207748
    Abstract: An apparatus (10) for contactless measurement of sheet charge density and mobility includes a microwave source (16), a circular waveguide (50) for transmitting microwave power to a sample (59), such as a semiconductor wafer or panel for flat panel displays, at a measurement location, a first detector (18) for detecting the forward microwave power, a second detector (23) for detecting the microwave power reflected from the sample, and a third detector (95) for detecting the Hall effect power. An automatic positioning subsystem (700) is also provided for allowing automatic positioning of a wafer (59) within the test apparatus (10). The positioning system (700) includes a first end effector (706) and a rotator-lifter (704).
    Type: Grant
    Filed: August 10, 2005
    Date of Patent: June 26, 2012
    Assignee: Lehighton Electronics, Inc.
    Inventors: Austin Blew, Michael W. Bronko, Steven C. Murphy, Danh Nguyen, Nikolai Eberhardt, Jerome C. Licini, William Zuidervliet