Abstract: The present disclosure relates to systems and methods for detecting anomalies in a semiconductor processing system. According to certain embodiments, one or more external sensors are mounted to a sub-fab component, communicating with the processing system via a communication channel different than a communication channel utilized by the sub-fab component and providing extrinsic sensor data that the sub-fab component is not configured to provide. The extrinsic sensor data may be combined with sensor data from a processing tool of the system and/or intrinsic sensor data of the sub-fab component to form virtual sensor data. In the event the virtual data exceeds or falls below a threshold, an intervention or a maintenance signal is dispatched, and in certain embodiments, an intervention or maintenance action is taken by the system.

Abstract: Methods, systems, and computer program products for managing Internet of Things (IoT) network-connected devices.

Abstract: Described are flexible vessels that are useful for containing a liquid and freezing the liquid, and a flexible resistive heating element that is adapted to heat the frozen liquid to cause the frozen liquid to melt.

Abstract: Large format polymeric containers formed by injection molding include a main body having internal surfaces of high density and smoothness that define the internal space. The large format containers can include external features such as reinforcement ribs that are formed integrally with the container body, the reinforcement ribs having greater thicknesses than other portions of the walls of the container. The internal surfaces can include rounded corners and sloping towards a center of the container. Methods of manufacturing the large format polymeric containers include forming the polymeric main body using injection molding. The polymeric main body can be formed of multiple injection molded parts that are joined, or formed as a single piece. The injection molding can include applying between approximately 700 bar and approximately 1100 bar of pressure where at least a portion of the internal surface contacts a mold surface.

Abstract: The present disclosure relates to systems and methods for detecting anomalies in a semiconductor processing system. According to certain embodiments, one or more external sensors are mounted to a sub-fab component, communicating with the processing system via a communication channel different than a communication channel utilized by the sub-fab component and providing extrinsic sensor data that the sub-fab component is not configured to provide. The extrinsic sensor data may be combined with sensor data from a processing tool of the system and/or intrinsic sensor data of the sub-fab component to form virtual sensor data. In the event the virtual data exceeds or falls below a threshold, an intervention or a maintenance signal is dispatched, and in certain embodiments, an intervention or maintenance action is taken by the system.

Abstract: Methods, systems, and computer program products for managing Internet of Things (IoT) network-connected devices.

Abstract: Embodiments herein provide methods of monitoring temperatures of fluid delivery conduits for delivering fluids to, and other components external to, a processing volume of a processing chamber used in electronic device fabrication manufacturing, and monitoring systems related thereto. In one embodiment, a method of monitoring a processing system includes receiving, through a data acquisition device, temperature information from one or more temperature sensors and receiving context information from a system controller coupled to a processing system comprising the processing chamber. Here, the one or more temperature sensors are disposed in one or more locations external to a processing volume of a processing chamber. The context information relates to instructions executed by the system controller to control one or more operations of the processing system.

Abstract: A system and method for controlling a lighting system may be integrated into a lighting fixture or into a stand-alone device. A plurality of inputs defining one or more lighting parameters may be received. The inputs may include input signals characterized by at least two different control protocols. The input signals may be combined into an output signal characterized by a single control protocol, and the output signal used to control the lighting system.

Abstract: Large format polymeric containers formed by injection molding include a main body having internal surfaces of high density and smoothness that define the internal space. The large format containers can include external features such as reinforcement ribs that are formed integrally with the container body, the reinforcement ribs having greater thicknesses than other portions of the walls of the container. The internal surfaces can include rounded corners and sloping towards a center of the container. Methods of manufacturing the large format polymeric containers include forming the polymeric main body using injection molding. The polymeric main body can be formed of multiple injection molded parts that are joined, or formed as a single piece. The injection molding can include applying between approximately 700 bar and approximately 1100 bar of pressure where at least a portion of the internal surface contacts a mold surface.

Abstract: The present disclosure relates to systems and methods for detecting anomalies in a semiconductor processing system. According to certain embodiments, one or more external sensors are mounted to a sub-fab component, communicating with the processing system via a communication channel different than a communication channel utilized by the sub-fab component and providing extrinsic sensor data that the sub-fab component is not configured to provide. The extrinsic sensor data may be combined with sensor data from a processing tool of the system and/or intrinsic sensor data of the sub-fab component to form virtual sensor data. In the event the virtual data exceeds or falls below a threshold, an intervention or a maintenance signal is dispatched, and in certain embodiments, an intervention or maintenance action is taken by the system.

Abstract: Methods, systems, and computer program products for managing Internet of Things (IoT) network-connected devices.

Abstract: A system and method for controlling a lighting system may be integrated into a lighting fixture or into a stand-alone device. A plurality of inputs defining one or more lighting parameters may be received. The inputs may include input signals characterized by at least two different control protocols. The input signals may be combined into an output signal characterized by a single control protocol, and the output signal used to control the lighting system.

Abstract: Methods, systems, and computer program products for managing Internet of Things (IoT) network-connected devices.

Abstract: A system, method, and computer program product are provided for accessing a device connected to a network. In operation, a device connected to a network is accessed by multiplexing and demultiplexing multiple connections.

Abstract: Methods, systems, and computer program products for managing Internet of Things (IoT) network-connected devices.

Abstract: Methods, systems, and computer program products for managing Internet of Things (IoT) network-connected devices.

Abstract: Embodiments of the disclosure relate to methods and a system for adjusting the chucking voltage of an electrostatic chuck. In one embodiment, a system for plasma processing a substrate includes a plasma processing chamber, a radio-frequency (RF) matching circuit coupled to the chamber, a sensor and a controller. The chamber includes a chamber body having an inner volume, a bipolar electrostatic chuck disposed in the inner volume and a power supply configured to provide chucking voltage to a pair of electrodes embedded within the electrostatic chuck. When plasma is energized within the chamber by the application of RF power through an RF matching circuit, the sensor is configured to detect a change in an electrical characteristic at the RF matching circuit. The controller is coupled to the power supply and configured to adjust the chucking voltage in response to the change in the electrical characteristic detected by the sensor.

Abstract: A system, method, and computer program product are provided for accessing a device connected to a network. In operation, a device connected to a network is accessed by multiplexing and demultiplexing multiple connections.

Abstract: Embodiments herein provide methods of monitoring temperatures of fluid delivery conduits for delivering fluids to, and other components external to, a processing volume of a processing chamber used in electronic device fabrication manufacturing, and monitoring systems related thereto. In one embodiment, a method of monitoring a processing system includes receiving, through a data acquisition device, temperature information from one or more temperature sensors and receiving context information from a system controller coupled to a processing system comprising the processing chamber. Here, the one or more temperature sensors are disposed in one or more locations external to a processing volume of a processing chamber. The context information relates to instructions executed by the system controller to control one or more operations of the processing system.

Abstract: Methods, systems, and computer program products for managing Internet of Things (IoT) network-connected devices.