Patents by Inventor Michael W. Pacier

Michael W. Pacier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Automated Batch Production Thin Film Deposition Systems and Methods of Using the Same
    Publication number: 20220076976
    Abstract: Fully automated batch production thin film deposition systems configured to deliver uniformity combined with high throughput at a low cost-per-wafer. In some examples, systems of the present disclosure include automated safe wafer handling via low-impact batch transfer via transportable wafer racks loaded with a plurality of wafers. In some examples, systems include a modular pre-heat & cool-down architecture that enables a flexible thermal management solution tailored around particular specifications.
    Type: Application
    Filed: February 19, 2020
    Publication date: March 10, 2022
    Inventors: Michael W. Pacier, Michael J. Sershen, Adam F. Bertuch, Laurent Lecordier, Thousif Ahamad Khan Hosakote Buden, Ramesh Prasad Manchaladore Narahari Rao
  • Transportable semiconductor wafer rack
    Patent number: D908102
    Type: Grant
    Filed: February 20, 2019
    Date of Patent: January 19, 2021
    Assignee: Veeco Instruments Inc.
    Inventors: Michael W. Pacier, Michael J. Sershen, Adam F. Bertuch, Laurent Lecordier
  • Transportable semiconductor wafer rack
    Patent number: D908103
    Type: Grant
    Filed: February 20, 2019
    Date of Patent: January 19, 2021
    Assignee: Veeco Instruments Inc.
    Inventors: Michael W. Pacier, Michael J. Sershen, Adam F. Bertuch, Laurent Lecordier