Abstract: Fluidic systems and methods of determining properties of fluids flowing therein. The fluidic systems and methods make use of a micromachined device that determines at least one property of the fluid within the system. The micromachined device includes a base structure on a substrate and a tube structure extending from the base structure and spaced apart from a surface of the substrate. The tube structure has at least one pair of geometrically parallel tube portions substantially lying in a plane, and at least one continuous internal passage defined at least in part within the parallel tube portions. A drive element induces vibrational movement of the tube structure in the plane of the tube structure and induces resonant vibrational movements in the tube portions in the plane of the tube structure. A sensing element senses deflections of each tube portion in the plane of the tube structure.

Abstract: A microelectromechanical system (MEMS) device and a method for operating the device to determine at least one property of a fluid. The device includes a base on a substrate and a tube structure extending from the base and spaced apart from a surface of the substrate. The tube structure includes at least one tube portion and more preferably at least a pair of parallel tube portions substantially lying in a plane, at least one continuous internal passage defined at least in part within the parallel tube portions, and an inlet and outlet of the internal passage fluidically connected to the base. A drive element is operable to induce vibrational movement in the tube structure in a plane of the tube structure and induce resonant vibrational movements in the tube portions. A sensing element senses the deflections of the tube portions when the tube structure is vibrated with the drive element.

Abstract: Fluidic systems and methods of determining properties of fluids flowing therein. The fluidic systems and methods make use of a micromachined device that determines at least one property of the fluid within the system. The micromachined device includes a base structure on a substrate and a tube structure extending from the base structure and spaced apart from a surface of the substrate. The tube structure has at least one pair of geometrically parallel tube portions substantially lying in a plane, and at least one continuous internal passage defined at least in part within the parallel tube portions. A drive element induces vibrational movement of the tube structure in the plane of the tube structure and induces resonant vibrational movements in the tube portions in the plane of the tube structure. A sensing element senses deflections of each tube portion in the plane of the tube structure.

Abstract: A microelectromechanical system (MEMS) device and a method for operating the device to determine at least one property of a fluid. The device includes a base on a substrate and a tube structure extending from the base and spaced apart from a surface of the substrate. The tube structure includes at least one tube portion and more preferably at least a pair of parallel tube portions substantially lying in a plane, at least one continuous internal passage defined at least in part within the parallel tube portions, and an inlet and outlet of the internal passage fluidically connected to the base. A drive element is operable to induce vibrational movement in the tube structure in a plane of the tube structure and induce resonant vibrational movements in the tube portions. A sensing element senses the deflections of the tube portions when the tube structure is vibrated with the drive element.

Abstract: Systems and methods for determining a temperature of a ferroelectric sensor are provided. The ferroelectric sensor has operational characteristics defined by a polarization versus voltage hysteresis loop. In one exemplary embodiment, the method includes applying a symmetrical periodic voltage waveform to the ferroelectric sensor so as to induce the ferroelectric sensor to traverse the polarization versus voltage hysteresis loop. The method further includes monitoring voltages across the ferroelectric sensor and polarization states of the ferroelectric sensor over a first time interval to determine a first zero field polarization state and a first coercive field voltage. The method further includes determining a first temperature value indicative of the temperature of the ferroelectric sensor based on the first coercive field voltage.

Abstract: Systems and methods for determining a temperature of a ferroelectric sensor are provided. The ferroelectric sensor has operational characteristics defined by a polarization versus voltage hysteresis loop. In one exemplary embodiment, the method includes applying a symmetrical periodic voltage waveform to the ferroelectric sensor so as to induce the ferroelectric sensor to traverse the polarization versus voltage hysteresis loop. The method further includes monitoring voltages across the ferroelectric sensor and polarization states of the ferroelectric sensor over a first time interval to determine a first zero field polarization state and a first coercive field voltage. The method further includes determining a first temperature value indicative of the temperature of the ferroelectric sensor based on the first coercive field voltage.

Abstract: An electromagnetic microactuator having a ferromagnetic substrate, preferably steel. A plurality of layers are deposited upon the substrate including an insulating layer, a seed layer and first and second photoresist layers. The first photoresist layer provides a coil well which defines the deposition location of a coil metal. The second photoresist layer provides central and peripheral core wells which define the deposition locations of a central core and a peripheral core, respectively. The second photoresist layer intersticially fills and protectively covers the coil.

Abstract: An electromagnetic microactuator having a ferromagnetic substrate, preferably steel. A plurality of layers are deposited upon the substrate including an insulating layer, a seed layer and first and second photoresist layers. The first photoresist layer provides a coil well which defines the deposition location of a coil metal. The second photoresist layer provides central and peripheral core wells which define the deposition locations of a central core and a peripheral core, respectively. The second photoresist layer intersticially fills and protectively covers the coil.

Abstract: A microstructure for a vibratory gyroscope has a ring portion supported in such a fashion to allow substantially undamped, high-Q radial vibration. The ring portion is electrically conductive and comprises a charge plate for a plurality of radially disposed charge conductive sites around its perimeter for sensing radial displacements thereof. The ring, its support and charge conductive sites are formed within sacrificial molds on one surface of a conventional silicon substrate which may comprise a monolithic integrated circuit.

Abstract: A control circuit for a resonating rotation sensor has a pair of closed loop controls for independently controlling component traveling waves of a resonant pattern in a ring shaped resonant member. Frequency and phase quantities of the independent traveling waves as well as time dependant quantities thereof indicate total rotation angle, rotation raze and rotation direction.

Abstract: A microaccelerometer is provided for use in on-board automotive safety control and navigational systems. The microaccelerometer includes a central support body which is supported upon a backing chip, a peripheral proof mass which circumscribes the central support body, and at least one pair of microbridges, each of which are attached to both the central support body and the peripheral proof mass. The pair of microbridges extend outwardly in opposite directions from the central support body such that a longitudinal axis through each of the microbridges forms a common axis through the central support body. The microbridges are attached to the peripheral proof mass at the end opposite the central support body so as to suspend the peripheral proof mass circumferentially about the central support body and above the backing chip.

Abstract: A resonant bridge two-axis microaccelerometer is disclosed comprising polysilicon resonant bridges orthogonally attached to a silicon proof mass, such that the silicon proof mass is suspended by the resonant bridges. Acceleration in the plane of the substrate causes differential axial loads on the opposing microbridges in each pair, thereby shifting their resonant frequencies. The acceleration component aligned with a pair is measured by the difference in resonant frequencies.

Abstract: New and improved compacted or powder pressed materials for thermoelectric applications include a body formed from compacted powder material including at least bismuth and tellurium and at least one highly electrically conductive phase. The materials are made in accordance with the general method of the present invention by forming a particulate mixture containing the constituent elements of a first compound including at least bismuth and tellurium and the constituent elements of a second compound capable of forming at least one highly electrically conductive phase, and thereafter, compressing at least a portion of said particulate mixture to form a compacted body of the material. In accordance with a first preferred embodiment, the first and second compounds are first separately prepared from their respective constituent elements. The first and second compounds are then combined and heated to form a melt. Thereafter, the melt is cooled to solid material form and then crushed to form the particulate mixture.