Patents by Inventor Michael Zeidler

Michael Zeidler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240079207
    Abstract: A multi-beam charged particle system and a method of setting a working distance WD of the multi beam charged particle system are provided. With the method, the working distance is adjusted while the imaging performance of a wafer inspection task is maintained by computing parameter values of components from predetermined calibration parameter values. The method can allow a relatively fast wafer inspection task even with a wafer stage with a fixed z-position parallel to an optical axis of the multi-beam charged particle system.
    Type: Application
    Filed: November 6, 2023
    Publication date: March 7, 2024
    Inventors: Michael Behnke, Ulrich Bihr, Christof Riedesel, Arne Thoma, Dirk Zeidler
  • Patent number: D1013434
    Type: Grant
    Filed: May 23, 2022
    Date of Patent: February 6, 2024
    Assignee: MARS, INCORPORATED
    Inventors: Rory Johnston, Steve Waters, Matthew Austwick, Chris MacKintosh, Regis Adam, Thibaud Capra, Bernhard Huptas, Daniel Muscheid, Michael Zeidler
  • Patent number: D1014166
    Type: Grant
    Filed: May 23, 2022
    Date of Patent: February 13, 2024
    Assignee: MARS, INCORPORATED
    Inventors: Rory Johnston, Steve Waters, Matthew Austwick, Chris Mackintosh, Regis Adam, Thibaud Capra, Bernhard Huptas, Daniel Muscheid, Michael Zeidler
  • Patent number: D1015045
    Type: Grant
    Filed: May 23, 2022
    Date of Patent: February 20, 2024
    Assignee: MARS, INCORPORATED
    Inventors: Rory Johnston, Steve Waters, Matthew Austwick, Chris Mackintosh, Regis Adam, Thibaud Capra, Bernhard Huptas, Daniel Muscheid, Michael Zeidler
  • Patent number: D1015046
    Type: Grant
    Filed: May 23, 2022
    Date of Patent: February 20, 2024
    Assignee: MARS, INCORPORATED
    Inventors: Rory Johnston, Steve Waters, Matthew Austwick, Chris Mackintosh, Regis Adam, Thibaud Capra, Bernhard Huptas, Daniel Muscheid, Michael Zeidler