Abstract: Vacuum adjustment device for an active element movable in a process atmosphere region, having a coupling, a drive unit having an electric motor, which cooperates with the coupling in such a way that the coupling can be adjusted from a normal position into an active position and back. The device has a mechanical interface for connecting the vacuum adjustment device to a process volume providing a process atmosphere, a dynamic separating device for separating the process atmosphere from an outer atmosphere region and a control and processing unit at least electrically connected to the drive unit and designed to control the electric motor.

Abstract: The invention relates to a vacuum process system for an evacuable vacuum process volume, a vacuum valve, a peripheral unit having a closed-loop and open-loop control unit. The vacuum valve includes a valve seat, with a valve opening and a first sealing surface; a valve closure, with a second sealing surface and a drive unit coupled to the valve closure. The valve closure can be varied to provide different valve opening states. The closed-loop and open-loop control unit can perform multiple execution of a process cycle with control of the peripheral unit at least in part to execute a control cycle providing a deliberate variation or setting of the valve opening state by controlling the drive unit on the basis of a currently determined controlled variable for a process parameter and on the basis of a target variable and can be performed with a certain temporal relation.

Abstract: Method for monitoring a state of a pin lifter device (10), wherein the pin lifter device (10) is designed for moving and positioning a substrate in a process atmosphere region (P). The pin lifter device (10) has a coupling (18) and a drive unit (12) having an electric motor, which is designed and interacts with the coupling (18) in such a way that the coupling (18) is adjustable from a lowered normal position into an individual active position and back. The method for monitoring includes progressively receiving a present item of motor current information with respect to a motor current applied to the electric motor, comparing the present motor current information to an item of target current information, and deriving an item of state information based on the comparison.

Abstract: Disclosed is a vacuum valve having at least one acoustic sensor, the acoustic sensor being designed such that information can be generated by the acoustic sensor via a structure-borne sound wave, as a measuring signal, impacting on at least one component of the vacuum valve.

Abstract: A valve (1) having at least one closure member (2) for closing a valve opening (3) and at least one valve rod (4), at least one first connecting section (5) being provided in or on the valve rod (4), at least one second connecting section (6) being provided in or on the closure member (2), and the closure member being fastenable or fastened to the valve rod by the connection of the first connecting section to the second connecting section. The first connecting section (5) and/or the second connecting section (6) has/have at least one pressure chamber (8) for a fluid, this chamber being delimited by at least one elastically deformable boundary wall (7) and the boundary wall can be elastically deformed by the fluid provided in the pressure chamber (8) in order to form a clamped connection of the first connecting section (5) to the second connecting section (6).

Abstract: The invention relates to a vacuum process system for an evacuable vacuum process volume, a vacuum valve, a peripheral unit having a closed-loop and open-loop control unit. The vacuum valve includes a valve seat, with a valve opening and a first sealing surface; a valve closure, with a second sealing surface and a drive unit coupled to the valve closure. The valve closure can be varied to provide different valve opening states. The closed-loop and open-loop control unit can perform multiple execution of a process cycle with control of the peripheral unit at least in part to execute a control cycle providing a deliberate variation or setting of the valve opening state by controlling the drive unit on the basis of a currently determined controlled variable for a process parameter and on the basis of a target variable and can be performed with a certain temporal relation.

Abstract: In a seal arrangement for sealing first and second components of a vacuum device to one another using an elastomeric sealing material arranged on one of the two components and interacts with a sealing surface arranged on the other component, in a sealed state of the components, the first component is pressed onto the second component by a pressing-on force which acts in a pressing-on direction. The first component has a carrying portion and a bending portion. The elastomeric sealing material is arranged on the bending portion and the sealing surface is arranged on the second component, or vice versa. The thickness of the bending portion, for the case that the elastomeric sealing material is arranged on the bending portion without accounting for the elastomeric sealing material is less than one third of the thickness of the carrying portion and less than one fifth of the length of the bending portion.

Abstract: Disclosed is a vacuum valve having at least one acoustic sensor, the acoustic sensor being designed such that information can be generated by the acoustic sensor via a structure-borne sound wave, as a measuring signal, impacting on at least one component of the vacuum valve.

Abstract: A valve (1) having at least one closure member (2) for closing a valve opening (3) and at least one valve rod (4), at least one first connecting section (5) being provided in or on the valve rod (4), at least one second connecting section (6) being provided in or on the closure member (2), and the closure member being fastenable or fastened to the valve rod by the connection of the first connecting section to the second connecting section. The first connecting section (5) and/or the second connecting section (6) has/have at least one pressure chamber (8) for a fluid, this chamber being delimited by at least one elastically deformable boundary wall (7) and the boundary wall can be elastically deformed by the fluid provided in the pressure chamber (8) in order to form a clamped connection of the first connecting section (5) to the second connecting section (6).

Abstract: The invention relates to a vacuum valve having a screw element for coupling a first component of the vacuum valve to a second component. The screw element has a force transfer surface section between a threaded surface section having a first thread and an engagement surface section, arranged in a first gas region, for a tool. The first and second component are coupled by a thread engagement, carried out through a passage hole in the first component, between the first thread and a second thread assigned to the second component. The screw element has a sealing surface section between the threaded surface section and the engagement surface section. Between the sealing surface section and a sealing face of the first component, a sealing seal element is arranged so the first gas region is separated in a gas-tight or particle-tight manner from a third gas region.

Abstract: A micromirror device (21) comprises an electrostatically actuable micromirror (25) and also a frame (27) and a base (9). The micromirror (25) is cardanically suspended in the base (9) via the frame (27) in that it is connected to the frame (27) via two articulated joints and the frame (27) is connected to the base (9) via two further articulated joints. In this way, the micromirror (25) can be actuated by application of an electrical voltage to correspondingly positioned electrodes, that is to say that one or both of the rotation axes defined by the two pairs of articulated joints are pivoted. The micromirror is then suspended in such a way that the two articulated joints defining one of the two rotation axes each comprise a torsion spring and the other two articulated joints defining the other of the two rotation axes each comprise a bending spring.

Abstract: A micro electromechanical shutter device and a pixel arrangement in which respective shutter elements are configured to controllably take a first geometrical state open and a second geometrical state closed by different degrees of actuation, and wherein the first geometrical state of the shutter element is configured to correspond to a non-actuated rest state of the shutter element.