Abstract: A pulsing assembly for delivering power to a plasma reactor having a first load between a first plasma reactor input port and a plasma reactor common port and having a second load between a second plasma reactor input port and the plasma reactor common port. The pulsing assembly includes a first pulsing unit, a second pulsing unit and an energy storage component connected therebetween. The first pulsing unit includes a first input port connectable to a power source, a pulsing assembly common port connectable to the plasma reactor common port, a first output port connectable to the first load of the plasma reactor for supplying pulses between the first output port and the pulsing assembly common port. The second pulsing unit includes a second input port connectable to a power source and a second output port connectable to the second load of the plasma reactor.

Abstract: A high voltage (HV) switch unit includes a plurality of semiconductor switches connected with each other in series and configured to switch on and off simultaneously, and a plurality of series circuits. Each series circuit includes a snubber energy storage component and a snubber rectifying component. Each series circuit is connected parallel to each respective semiconductor switch. The HV switch unit further includes a voltage balancing circuit comprising a plurality of balancing electronic components in combination with a voltage limiting electronic component. The plurality of balancing electronic components forms a chain parallel to the serially connected semiconductor switches. The chain is configured to transport electrical charge from one snubber energy storage component to the next only in one direction. The voltage limiting electronic component is configured to limit a voltage at an end of the chain, where the electrical charge is transported to.

Abstract: A method of balancing voltage distribution over a plurality of switches connected in series with each other in a high voltage (HV) switch is provided. A snubber arrangement is associated with each switch of the plurality of switches. The method includes, for a first snubber arrangement associated with a first switch of the plurality of switches, determining a first voltage across a first snubber energy storage component of the first snubber arrangement associated with the first switch. The method further includes, for a second snubber arrangement associated with a second switch of the plurality of switches, determining a second voltage across a second snubber energy storage component of the second snubber arrangement associated with the second switch. The method further includes comparing the first voltage and the second voltage and, based on the comparison, adjusting a first drive signal of at least the first switch based on the first voltage.