Abstract: The disclosure provides an apparatus for depositing poly(p-xylylene) onto a component. The apparatus comprises a deposition chamber configured to receive a component to be coated therein; an electrical power supply; a platen, disposed inside the deposition chamber and comprising an electrically conductive material, wherein the platen is electrically connected to the electrical power supply and configured to support the component; a monomer reservoir, configured to receive a monomer of poly(p-xylylene) therein; a monomer conduit extending between the monomer reservoir and the deposition chamber; and a heating means configured to heat the monomer reservoir and the monomer conduit to a temperature of between 25 and 250° C.

Abstract: A method for depositing a multilayer coating onto a substrate includes supporting the substrate on a platen comprising an electrically conductive material disposed in a deposition chamber, connected to an electrical power supply and electrically insulated from an electrode. The pressure in the deposition chamber is less than 10 Torr when a first feedstock is fed to the substrate. The electrical power supply is activated to create a plasma surrounding the substrate which ionises and/or activates particles within the first feedstock, allowing the ionised and/or activated particles from the first feedstock to deposit on the substrate and polymerise, thereby forming a first a coating on the substrate. Particles of a second feedstock, different from the first feedstock, are fed to the substrate and are ionized and/or activated by the plasma and allowed to deposit on the substrate and polymerise to form a second coating on the substrate.