Patents by Inventor Michal Geryk

Michal Geryk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11335536
    Abstract: An embodiment of electron microscope system is described that comprises an electron column pole piece and a light guide assembly operatively coupled together. The light guide assembly also includes one or more detectors, and a mirror with a pressure limiting aperture through which an electron beam from an electron source passes. The mirror is also configured to reflect light, as well as to collect back scattered electrons and secondary electrons.
    Type: Grant
    Filed: September 3, 2020
    Date of Patent: May 17, 2022
    Assignee: FEI Company
    Inventors: Marek Uncovsky, Michal Geryk, Jan Lasko
  • Publication number: 20210082659
    Abstract: An embodiment of electron microscope system is described that comprises an electron column pole piece and a light guide assembly operatively coupled together. The light guide assembly also includes one or more detectors, and a mirror with a pressure limiting aperture through which an electron beam from an electron source passes. The mirror is also configured to reflect light, as well as to collect back scattered electrons and secondary electrons.
    Type: Application
    Filed: September 3, 2020
    Publication date: March 18, 2021
    Inventors: Marek Uncovsky, Michal Geryk, Jan Lasko
  • Patent number: 9087673
    Abstract: A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.
    Type: Grant
    Filed: January 6, 2014
    Date of Patent: July 21, 2015
    Assignee: FEI COMPANY
    Inventors: Matthew Barrett, Michael D. Smith, Michal Geryk, Paul Scagnetti, Richard Tovey
  • Publication number: 20140191125
    Abstract: A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.
    Type: Application
    Filed: January 6, 2014
    Publication date: July 10, 2014
    Applicant: FEI Company
    Inventors: Matthew Barrett, Michael D. Smith, Michal Geryk, Paul Scagnetti, Richard Tovey
  • Patent number: 8624199
    Abstract: A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.
    Type: Grant
    Filed: October 28, 2011
    Date of Patent: January 7, 2014
    Assignee: FEI Company
    Inventors: Matthew Barrett, Michael D. Smith, Michal Geryk, Paul Scagnetti, Richard Tovey
  • Publication number: 20130105677
    Abstract: A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.
    Type: Application
    Filed: October 28, 2011
    Publication date: May 2, 2013
    Applicant: FEI Company
    Inventors: Matthew Barrett, Michael D. Smith, Michal Geryk, Paul Scagnetti, Richard Tovey