Abstract: A vacuum sputtering cathode includes a target support having a cooler. The cathode includes a support base on which a frame is disposed. The frame defines at least one cavity for the circulation of a coolant. A membrane is disposed on top of the frame and the base, frame and membrane are assembled at the periphery of the target.

Abstract: A cathode for a vacuum sputtering processing machine includes a target plate mounted on a support having a cooler. The support is secured to a frame delimiting a closed space for positioning and centering the target. The frame peripherally has a profiled catching rim configured to collaborate with a set of independent gripping elements having complementary catching shapes configured to allow an effect of tilting of the elements resulting from a clamping action exerted on members engaged in a thickness of the elements, and bearing against a part of the catching rim of the frame, so that, under the tilting effect, a part of the catching shapes of the set of gripping elements bears facially against a peripheral edge of the target plate to secure the target plate.

Abstract: A vacuum sputtering cathode includes a target support having a cooler. The cathode includes a support base on which a frame is disposed. The frame defines at least one cavity for the circulation of a coolant. A membrane is disposed on top of the frame and the base, frame and membrane are assembled at the periphery of the target.

Abstract: A cathode for a vacuum sputtering processing machine includes a target plate mounted on a support having a cooler. The support is secured to a frame delimiting a closed space for positioning and centering the target. The frame peripherally has a profiled catching rim configured to collaborate with a set of independent gripping elements having complementary catching shapes configured to allow an effect of tilting of the elements resulting from a clamping action exerted on members engaged in a thickness of the elements, and bearing against a part of the catching rim of the frame, so that, under the tilting effect, a part of the catching shapes of the set of gripping elements bears facially against a peripheral edge of the target plate secure the target plate.

Abstract: Articulated plates (L) are assembled in combination with at least two drive rums supported by a framework (6). The plates (L) present longitudinally, two by two, complementary guiding and articulation profiles (R) and (C) defined to create at least one continuous flat face. The plates are coupled to one another by flexible links (1).

Abstract: A funicular type transport device including a variation chain and at least one tractor chain. The variation chain includes a plurality of variation links of variable length forming a continuous loop and a plurality of mobiles interconnected with the plurality of variation links. Each of the plurality of mobile components is provided with an interconnection device selectively engageable with the at least one tractor chain. A sensor measures the tension in the variation chain. A control device responds to the sensor to maintain the tension in the variation chain below a predetermined maximum level.