Abstract: A device with a multi-layered micro-component electrical connector. The multi-layer micro-component electrical connector includes a dielectric layer, a micro-mesh of a first electrical conductor secured to the dielectric layer, and a second electrical conductor secured to and contacting the micro-mesh to provide electrical communication. The dielectric layer has a dielectric layer thermal expansion coefficient and the first electrical conductor has a thermal expansion coefficient different from the dielectric layer thermal expansion coefficient. Due to the presence of the micro-mesh the device is operable at temperatures above 250° C. without delamination or blistering of the first electrical conductor from the dielectric layer.

Abstract: A semiconductor flow sensor provides a self-aligning seal between the sensor and a manifold carrying the fluid being measured. The sensor includes a sensing element and a semiconductor body having a fluid flow region formed therein. The sensing element crosses through a portion of the flow region and is supported by the semiconductor body. A characteristic of the fluid flowing through the flow region is measured by operation of the sensing element. A sealing ring integrally disposed on the semiconductor body surrounds the flow region and further provides a seal between the sensor and a manifold. To ensure accurate placement of the sealing ring with respect to the sensing element, the sealing ring is electroplated to the semiconductor body prior to formation of the flow region. A pressure and temperature stable seal between the sensor and the manifold is achieved by either compression of the sealing ring, or solder bonding of the sealing ring to the manifold.

Abstract: Laminated wafers with channels formed therein define a plurality of gas chromatographic columns in a body, with substantially minimal connecting channels between an injector and a detector. One or more of the columns at a time is selected by valve to be receptive of sample gas. Detector and injector cavities have surfaces with the adsorbent phase utilized in the column being further coated on the surfaces, whereby the detector and injector constitute an integral portion of the gas chromatographic column. A channel is formed between wafers each with grooves that have semicircular cross sections so as to form the channel with a circular cross section. A digital gas injector includes a plurality of chambers with respective measured volumes. Valves select one or more of the chambers at a time to be receptive of sample gas from the common inlet.