Patents by Inventor Michel Loos
Michel Loos has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11003098Abstract: Tooling for a mask assembly suitable for use in a lithographic process, the mask assembly comprising a patterning device; and a pellicle frame configured to support a pellicle and mounted on the patterning device with a mount; wherein the mount provides a releasably engageable attachment between the patterning device and the pellicle frame.Type: GrantFiled: November 18, 2019Date of Patent: May 11, 2021Assignee: ASML Netherlands B.VInventors: Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn, Jeroen Dekkers, Paul Janssen, Ronald Harm Gunther Kramer, Matthias Kruizinga, Robert Gabriël Maria Lansbergen, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra, Gerrit Van Den Bosch, Jérôme François Sylvain Virgile Van Loo, Beatrijs Louise Marie-Joseph Katrien Verbrugge, Angelo Cesar Peter De Klerk, Jacobus Maria Dings, Maurice Leonardus Johannes Janssen, Roland Jacobus Johannes Kerstens, Martinus Jozef Maria Kester, Michel Loos, Geert Middel, Silvester Matheus Reijnders, Frank Johannes Christiaan Theuerzeit, Anne Johannes Wilhelmus Van Lievenoogen
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Patent number: 10969701Abstract: Tooling for a mask assembly suitable for use in a lithographic process, the mask assembly comprising a patterning device; and a pellicle frame configured to support a pellicle and mounted on the patterning device with a mount; wherein the mount provides a releasably engageable attachment between the patterning device and the pellicle frame.Type: GrantFiled: September 16, 2019Date of Patent: April 6, 2021Assignee: ASML Netherlands B.V.Inventors: Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn, Jeroen Dekkers, Paul Janssen, Ronald Harm Gunther Kramer, Matthias Kruizinga, Robert Gabriël Maria Lansbergen, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra, Gerrit Van Den Bosch, Jérôme François Sylvain Virgile Van Loo, Beatrijs Louise Marie-Joseph Katrien Verbrugge, Angelo Cesar Peter De Klerk, Jacobus Maria Dings, Maurice Leonardus Johannes Janssen, Roland Jacobus Johannes Kerstens, Martinus Jozef Maria Kester, Michel Loos, Geert Middel, Silvester Matheus Reijnders, Frank Johannes Christiaan Theuerzeit, Anne Johannes Wilhelmus Van Lievenoogen
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Publication number: 20200096882Abstract: Tooling for a mask assembly suitable for use in a lithographic process, the mask assembly comprising a patterning device; and a pellicle frame configured to support a pellicle and mounted on the patterning device with a mount; wherein the mount provides a releasably engageable attachment between the patterning device and the pellicle frame.Type: ApplicationFiled: November 18, 2019Publication date: March 26, 2020Applicant: ASML Netherlands B.V.Inventors: Frits VAN DER MEULEN, Maarten Mathijs Marinus JANSEN, Jorge Manuel AZEREDO LIMA, Derk Servatius Gertruda BROUNS, Marc BRUIJN, Jeroen DEKKERS, Paul JANSSEN, Ronald Harm Gunther KRAMER, Matthias KRUIZINGA, Robert Gabriël Maria LANSBERGEN, Martinus Hendrikus Antonius LEENDERS, Erik Roelof LOOPSTRA, Gerrit VAN DEN BOSCH, Jérôme François Sylvain Virgile VAN LOO, Beatrijs Louise Marie-Joseph Katrien VERBRUGGE, Angelo Cesar Peter DE KLERK, Jacobus Maria DINGS, Maurice Leonardus Johannes JANSSEN, Roland Jacobus Johannes KERSTENS, Martinus Jozef Maria KESTERS, Michel LOOS, Geert MIDDEL, Silvester Matheus REIJNDERS, Frank Johannes Christiaan THEUERZEIT, Anne Johannes Wilhelmus VAN LIEVENOOGEN
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Patent number: 10539886Abstract: A mask assembly suitable for use in a lithographic process. The mask assembly comprises a patterning device, a sub-frame secured to the patterning device, a pellicle frame configured to support a pellicle and a mechanical attachment interface operable to allow attachment of the pellicle frame to the sub-frame and detachment of the pellicle frame from the sub-frame.Type: GrantFiled: November 16, 2015Date of Patent: January 21, 2020Assignee: ASML Netherlands B.V.Inventors: Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn, Jeroen Dekkers, Paul Janssen, Ronald Harm Gunther Kramer, Matthias Kruizinga, Robert Gabriël Maria Lansbergen, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra, Gerrit Van Den Bosch, Jérôme François Sylvain Virgile Van Loo, Beatrijs Louise Marie-Joseph Katrien Verbrugge, Angelo Cesar Peter De Klerk, Jacobus Maria Dings, Maurice Leonardus Johannes Janssen, Roland Jacobus Johannes Kerstens, Martinus Jozef Maria Kesters, Michel Loos, Geert Middel, Silvester Matheus Reijnders, Frank Johannes Christiaan Theuerzeit, Anne Johannes Wilhelmus Van Lievenoogen
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Publication number: 20200012204Abstract: Tooling for a mask assembly suitable for use in a lithographic process, the mask assembly comprising a patterning device; and a pellicle frame configured to support a pellicle and mounted on the patterning device with a mount; wherein the mount provides a releasably engageable attachment between the patterning device and the pellicle frame.Type: ApplicationFiled: September 16, 2019Publication date: January 9, 2020Applicant: ASML Netherlands B.V.Inventors: Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn, Jeroen Dekkers, Paul Janssen, Ronald Harm, Gunther Kramer, Matthias Kruizinga, Robert Gabriël Maria Lansbergen, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra, Gerrit Van Den Bosch, Jérôme François Sylvain Virgile Van Loo, Beatrijs Louise Marie-Joseph Katrien Verbrugge, Angelo Cesar Peter De Klerk, Jacobus Maria Dings, Maurice Leonardus Johannes Janssen, Roland Jacobus Johannes Kerstens, Martinus Jozef Maria Kesters, Michel Loos, Geert Middel, Silvester Matheus Reijnders, Frank Johannes Christiaan Theuerzeit, Anne Johannes Wilhelmus Van Lievenoogen
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Patent number: 4395753Abstract: An allocation controller providing for equal priority sharing of multiple resources by a plurality of central processing units. Conflicts resulting from simultaneous requests from several CPUs for access to one of the common resources are resolved at a high rate of speed. In addition, an approximately statistically equal probability is maintained for access of the common resource by all the central processing units.Type: GrantFiled: June 26, 1980Date of Patent: July 26, 1983Assignee: GTE Automatic Electric Labs Inc.Inventors: Joseph A. Comfort, Thomas J. Perry, Michel Loos
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Patent number: 4394728Abstract: An allocation controller providing for equal priority sharing of duplicate copy multiple resources by a duplex plurality of central processing units. Conflicts resulting from simultaneous requests from several CPUs for access to one of the common resources are resolved at a high rate of speed. In addition, an approximately statistically equal probability is maintained for access of the common resource by all the central processing units.Type: GrantFiled: June 26, 1980Date of Patent: July 19, 1983Assignee: GTE Automatic Electric Labs Inc.Inventors: Joseph A. Comfort, Thomas J. Perry, Michel Loos
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Patent number: 4376975Abstract: An arbitration controller providing for equal priority sharing of a resource by a plurality of central processing units. Conflicts resulting from simultaneous requests from several CPUs for access to the common resource are resolved at a high rate of speed. In addition, an approximately statistically equal probability is maintained for access of the common resource by all the central processing units.Type: GrantFiled: June 26, 1980Date of Patent: March 15, 1983Assignee: GTE Automatic Electric Labs Inc.Inventors: Joseph A. Comfort, Thomas J. Perry, Michel Loos
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Patent number: 4374414Abstract: An arbitration controller providing for equal priority sharing of duplicate copy resources by a duplex plurality of central processing units. Conflicts resulting from simultaneous requests from several CPUs for access to the common resource are resolved at a high rate of speed. In addition, an approximately statistically equal probability is maintained for access of the common resource by all the central processing units.Type: GrantFiled: June 26, 1980Date of Patent: February 15, 1983Assignee: GTE Automatic Electric Labs Inc.Inventors: Joseph A. Comfort, Thomas J. Perry, Michel Loos
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Patent number: 4374413Abstract: An arbitration controller providing for equal priority sharing of a resource by a plurality of central processing units. Conflicts resulting from simultaneous requests from several CPU's for access to the common resource are resolved at a high rate of speed. In addition, an approximately statistically equal probability is maintained for access of the common resource by all the central processing units.Type: GrantFiled: June 26, 1980Date of Patent: February 15, 1983Assignee: GTE Automatic Electric Labs Inc.Inventors: Joseph A. Comfort, Thomas J. Perry, Michel Loos
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Patent number: 4363096Abstract: An arbitration controller providing for equal priority sharing of duplicate copy resources by a duplex plurality of central processing units. Conflicts resulting from simultaneous requests from several CPU's for access to the common resource are resolved at a high rate of speed. In addition, an approximately statistically equal probability is maintained for access of the common resource by all the central processing units.Type: GrantFiled: June 26, 1980Date of Patent: December 7, 1982Assignee: GTE Automatic Electric Labs Inc.Inventors: Joseph A. Comfort, Thomas J. Perry, Michel Loos
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Patent number: 4356404Abstract: This is a circuit for use to increase the number of bus circuit boards in a closed loop bus configuration. This circuit detects which bus circuit board is the last circuit board equipped in a closed loop configuration and closes the bus at that circuit, without requiring wiring changes or "dummy" circuit boards.Type: GrantFiled: May 26, 1981Date of Patent: October 26, 1982Assignee: GTE Automatic Electric Labs Inc.Inventors: Joseph A. Comfort, Thomas J. Perry, Michel Loos