Abstract: A scanner assembly is configured to be mounted on a scanner manipulator arm, to be placed in proximity to an opening in a vessel or inserted into an opening in a vessel, and to measure distances from a scanner emitter/sensor within the scanner assembly to a plurality of points on the surface of the refractory lining to characterize the concave interior of the vessel in a single scan. A scanner manipulator having a manipulator arm attached to the scanner assembly maintains the scanner assembly in measurement positions. A control system controls the position of the scanner assembly, the orientation of the emitter sensor, and the acquisition, storage, processing and presentation of measurements produced by the emitter/sensor. The field of view obtained from the scanner assembly in a single scan exceeds a hemisphere.

Abstract: The present invention relates generally to high-temperature vessels lined with refractory material. More specifically, the present invention relates to a method for implementation of tracking and contouring systems, automated collection of data, and processing of the measured data in either a stationary or a mobile configuration to accurately determine profiles of localized refractory thickness and/or bath height of molten material in the high-temperature vessel using the tracking system to fix the position of the contouring system with respect to the vessel.

Abstract: A novel method for analyzing the pulse train resulting from a scanned beam particle monitor is described. The method enhances signal-to-noise ratio and significantly reduces particle false alarm rate. Performed in the time domain, the method filters noise pulses that do not occur at the scanner frequency. The analysis further identifies particle-pulse-envelopes (PPE's) by performing a forward-looking and backward-looking autocorrelation. Gaussian fits are subsequently applied to identified particle-pulse envelopes, to determine particle characteristics, such as size and speed.

Abstract: The present invention relates generally to high-temperature vessels lined with refractory material. More specifically, the present invention relates a method for implementation of a tracking and contouring systems, automated collection of data, and processing of the measured data in either a stationary or a mobile configuration to accurately determine profiles of localized refractory thickness and/or bath height of molten material in said high-temperature vessel using the tracking system to fix the position of the contouring system with respect to said vessel.

Abstract: A novel method for analyzing the pulse train resulting from a scanned beam particle monitor is described. The method enhances signal-to-noise ratio and significantly reduces particle false alarm rate. Performed in the time domain, the method filters noise pulses that do not occur at the scanner frequency. The analysis further identifies particle-pulse-envelopes (PPE's) by performing a forward-looking and backward-looking autocorrelation. Gaussian fits are subsequently applied to identified particle-pulse envelopes, to determine particle characteristics, such as size and speed.

Abstract: A particle sensor for a semiconductor device fabrication tool scans a laser beam through a measurement volume immediately adjacent a wafer during processing and detects light scattered by particles adjacent the wafer. Scanning provides a real-time count of particles without interfering with processing. Detected light can be forward-scattered, side-scattered, or back-scattered depending on available optical access for a detector portion of the sensor. A pulse in the intensity of scattered light results each time a particle is scanned. Because the scanning velocity is high relative to the particle velocity, each particle may be scanned several times while the particle is in the measurement volume. Analysis fits a series of pulses observed for a single particle to a Gaussian distribution to determine a size, position, and velocity for each particle and a time-resolved particle count of the particles.