Abstract: A system includes a stator, and a first carrier and a second carrier disposed over a horizontal surface of the stator. A plurality of electromagnetic coils are disposed in an array beneath the horizontal surface. The first carrier and the second carrier each include plurality of magnets arranged in an array and are configured to support a first substrate and a second substrate, respectively. A controller is configured to individually energize each of the plurality of electromagnetic coils, which causes the first carrier and the second carrier to levitate above the horizontal surface and independently move in a loop relative to the horizontal surface. The plurality of electromagnetic coils can apply a differential force to adjust a planar alignment of the first substrate or the second substrate, and a metrology tool can take one or more measurements of the first substrate or the second substrate.

Abstract: Methods and systems for realizing a high throughput wafer positioning system with high positioning accuracy are presented herein. The high throughput, high accuracy wafer positioning system is employed to measure structural and material characteristics (e.g., material composition, dimensional characteristics of structures and films, etc.) associated with different semiconductor fabrication processes. In one aspect, iron core linear motor assemblies are arranged in a magnetically opposed configuration such that the magnetic attraction forces inherent to each opposing iron core linear motor assembly largely cancel one another. The reduced force applied to sensitive stage frame elements, in turn, reduces induced deformations and stage positioning errors. In some embodiments, a wafer positioning system includes stacked magnetically opposed long stroke stages.

Abstract: Methods and systems for realizing a high speed, rotating anode based x-ray illumination source suitable for high throughput x-ray metrology are presented herein. A high speed rotating anode includes a water cooled rotating platen supported by radial and thrust air bearings employing cascaded differential pumping. A very high bending stiffness of the rotating assembly is achieved by spacing radial air bearings far apart and locating a rotary motor and thrust bearings between the radial air bearings. The high bending stiffness increases the mechanical stability of the rotating assembly during high speed operation, and thus decreases vibration at the location of impingement of the electron beam on the rotating anode material. In some embodiments, magnetic thrust bearings are employed and the air gap is controlled to maintain a desired gap over an operational range of up to three millimeters.

Abstract: Methods and systems for realizing a high speed, rotating anode based x-ray illumination source suitable for high throughput x-ray metrology are presented herein. A high speed rotating anode includes a water cooled rotating platen supported by radial and thrust air bearings employing cascaded differential pumping. A very high bending stiffness of the rotating assembly is achieved by spacing radial air bearings far apart and locating a rotary motor and thrust bearings between the radial air bearings. The high bending stiffness increases the mechanical stability of the rotating assembly during high speed operation, and thus decreases vibration at the location of impingement of the electron beam on the rotating anode material. In some embodiments, magnetic thrust bearings are employed and the air gap is controlled to maintain a desired gap over an operational range of up to three millimeters.

Abstract: An actuator assembly (16) for moving a device (22) includes a stator component (30), a mover component (32), a measurement system (18), and a signal processor (20). The measurement system (18) includes (i) a magnet assembly (244) that is coupled to and moves with the mover component (32); and (ii) a plurality of spaced apart sensors (246A). The magnet assembly (244) produces a magnetic field (244B) that moves relative to the stator component (30) as the mover component (32) moves along a mover axis (32C). Each sensor (246A) is a transducer that generates a sensor signal that varies its output voltage in response to the changing magnetic field (244B) from the magnet assembly (244) as the mover component (32) is moved relative to the sensors (246A). The signal processor (20) receives the sensor signals and estimates a position of the mover component (32) along the mover axis (32C) based at least in part on the sensor signals.

Abstract: A rotary probe head having a dual interface for probe mounting that allows two separate interfaces to be mounted on opposite sides of the “A” or elevation axis of the rotary probe head. The two interfaces can be rotatable and interchangeable and allow for increased flexibility in handling different types of attachments including attachments having widely different mass, size, and/or interface connections. A probe can be mounted to one interface and a counterweight can be mounted to the opposite interface for improved holding torque performance by reducing the duty force and heat factor generation of the motor in the probe head.

Abstract: An actuator assembly (16) for moving a device (22) includes a stator component (30), a mover component (32), a measurement system (18), and a signal processor (20). The measurement system (18) includes (i) a magnet assembly (244) that is coupled to and moves with the mover component (32); and (ii) a plurality of spaced apart sensors (246A). The magnet assembly (244) produces a magnetic field (244B) that moves relative to the stator component (30) as the mover component (32) moves along a mover axis (32C). Each sensor (246A) is a transducer that generates a sensor signal that varies its output voltage in response to the changing magnetic field (244B) from the magnet assembly (244) as the mover component (32) is moved relative to the sensors (246A). The signal processor (20) receives the sensor signals and estimates a position of the mover component (32) along the mover axis (32C) based at least in part on the sensor signals.

Abstract: A stage assembly (10) that includes (i) a stage (14) that retains a device (26); (ii) a reaction assembly (18) that is spaced apart from the stage (14); (iii) a stage mover (16) that moves the stage (14), the stage mover (16) including a magnet array (38) that is coupled to the stage (14) and a conductor array (36) that is coupled to the reaction assembly (18); (iv) a temperature adjuster (20); and (v) a control system (22) that selectively controls the temperature adjuster (20). The conductor array (36) includes a set of first zone conductor units (250), and a set of second zone conductor units (252). The temperature adjuster (20) independently adjusts the temperature of the set of first zone conductor units (250), and the set of second zone conductor units (252).

Abstract: Current amplitudes in a motor can be controlled by summing a first signal indicative of an output current of the motor with a current command signal, integrating the current command signal with respect to time, and applying a first controller gain to a second signal indicative of the output current of the motor to obtain a gain-controlled signal indicative of the output current of the motor. The method further includes applying a second controller gain to the current command signal to obtain a gain-controlled current command signal, summing the gain-controlled signal indicative of the output current of the motor with the gain-controlled current command signal to obtain a voltage signal, and inputting the voltage signal to the motor such that current amplitudes in the motor are controlled.

Abstract: An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.

Abstract: A rotary probe head having a dual interface for probe mounting that allows two separate interfaces to be mounted on opposite sides of the “A” or elevation axis of the rotary probe head. The two interfaces can be rotatable and interchangeable and allow for increased flexibility in handling different types of attachments including attachments having widely different mass, size, and/or interface connections. A probe can be mounted to one interface and a counterweight can be mounted to the opposite interface for improved holding torque performance by reducing the duty force and heat factor generation of the motor in the probe head.

Abstract: A stage assembly (10) that includes (i) a stage (14) that retains a device (26); (ii) a reaction assembly (18) that is spaced apart from the stage (14); (iii) a stage mover (16) that moves the stage (14), the stage mover (16) including a magnet array (38) that is coupled to the stage (14) and a conductor array (36) that is coupled to the reaction assembly (18); (iv) a temperature adjuster (20); and (v) a control system (22) that selectively controls the temperature adjuster (20). The conductor array (36) includes a set of first zone conductor units (250), and a set of second zone conductor units (252). The temperature adjuster (20) independently adjusts the temperature of the set of first zone conductor units (250), and the set of second zone conductor units (252).

Abstract: A reaction assembly (20) for supporting a mover (18) includes a countermass assembly (26) and a fluid distribution network (28). The fluid distribution network (28) allows for circulating a fluid (30) to provide cooling for the portion of the mover (18). The fluid distribution network (28) is positioned substantially adjacent to the countermass assembly (26), and the fluid distribution network (28) being substantially thermally decoupled from the structure of the countermass assembly (26) to inhibit thermal deformation of the countermass assembly (26).

Abstract: A conveyor system includes a cartridge, which defines a section of the conveyor. In one embodiment, the cartridge includes a number of wheels, which are designed as a unit for a conveyor section and the wheels of the cartridge are designed to hold a belt. A conveyor section, in one optional embodiment, includes integrated sensors for detecting the presence of a container (e.g., FOUP), and each conveyor section can implement precision sheet metal rails that facilitate high speed FOUP transport. In one embodiment, each conveyor section has two sides. Each side has a cartridge that has a belt. In particular embodiments, one side of the conveyor section includes a drive motor, that drives the conveyor.

Abstract: A conveyor system includes a cartridge, which defines a section of the conveyor. In one embodiment, the cartridge includes a number of wheels, which are designed as a unit for a conveyor section and the wheels of the cartridge are designed to hold a belt. A conveyor section, in one optional embodiment, includes integrated sensors for detecting the presence of a container (e.g., FOUP), and each conveyor section can implement precision sheet metal rails that facilitate high speed FOUP transport. In one embodiment, each conveyor section has two sides. Each side has a cartridge that has a belt. In particular embodiments, one side of the conveyor section includes a drive motor, that drives the conveyor.

Abstract: An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.

Abstract: Electromagnetic actuators are disclosed having at least one actively cooled coil assembly. Exemplary actuators are linear and planar motors of which the cooled coil assembly has a coil having first and second main surfaces. A respective thermally conductive cooling plate is in thermal contact with at least one main surface of the coil. Defined in or on each cooling plate is a coolant passageway that conducts a liquid coolant. A primary pattern of the coolant passageway is coextensive with at least part of the main surface of the coil. The primary pattern can have a secondary pattern through which coolant flows in a manner reducing eddy-current losses. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices exhibit reduced eddy-current drag.

Abstract: A combination load lock apparatus is provided, wherein a chamber is coupled to two or more valves in selective fluid communication with two or more respective volumes. A support member for supporting a workpiece is disposed within an interior portion of the chamber, wherein a translation apparatus is operably coupled thereto. The translation apparatus is operable to rotate and/or translate the workpiece on the support member about and/or along a first axis, wherein a detection apparatus associated with the chamber is operable to detect one or more characteristics of the workpiece during the rotation and/or translation thereof. The workpiece may be further rotated in a predetermined manner based on the one or more detected characteristics. A recess is further defined in the interior portion of the chamber, wherein the translation apparatus is operable to translate the workpiece into and out of the recess to reduce particulate contamination thereon.

Abstract: A conveyor system includes a cartridge, which defines a section of the conveyor. In one embodiment, the cartridge includes a number of wheels, which are designed as a unit for a conveyor section and the wheels of the cartridge are designed to hold a belt. A conveyor section, in one optional embodiment, includes integrated sensors for detecting the presence of a container (e.g., FOUP), and each conveyor section can implement precision sheet metal rails that facilitate high speed FOUP transport. In one embodiment, each conveyor section has two sides. Each side has a cartridge that has a belt. In particular embodiments, one side of the conveyor section includes a drive motor, that drives the conveyor.

Abstract: An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.