Patents by Inventor Michel RlEPEN

Michel RlEPEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LITHOGRAPHIC APPARATUS, DRYING DEVICE, METROLOGY APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20150015857
    Abstract: An immersion lithographic apparatus is described in which a two-phase flow is separated into liquid-rich and gas-rich flows by causing the liquid-rich flow to preferentially flow along a surface.
    Type: Application
    Filed: September 26, 2014
    Publication date: January 15, 2015
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Nicolaas Rudolf KEMPER, Nicolaas TEN KATE, Joost Jeroen OTTENS, Marcel BECKERS, Marco POLIZZI, Michel RlEPEN, Anthonie KUIJPER, Koen STEFFENS, Adrianes Johannes BAETEN, Anca Mihaela ANTONEVICI