Patents by Inventor Michel Vilain

Michel Vilain has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9929196
    Abstract: A method of manufacturing a detector capable of detecting a wavelength range [?8; ?14] centered on a wavelength ?10, including: forming said device on a substrate by depositing a sacrificial layer totally embedding said device; forming, on the sacrificial layer, a cap including first, second, and third optical structures transparent in said range [?8; ?14], the second and third optical structures having equivalent refraction indexes at wavelength ?10 respectively greater than or equal to 3.4 and smaller than or equal to 2.3; forming a vent of access to the sacrificial layer through a portion of the cap, and then applying, through the vent, an etching to totally remove the sacrificial layer.
    Type: Grant
    Filed: January 6, 2017
    Date of Patent: March 27, 2018
    Assignees: Ulis, Commissariat A L'Energie Atomique Et Aux Energies Alternatives
    Inventors: Michel Vilain, Jérôme Favier, Jean-Jacques Yon, Laurent Frey
  • Patent number: 9869593
    Abstract: A bolometric detection device includes a substrate having a read-out circuit. The device also includes an array of elementary detectors each including a membrane suspended above the substrate and connected to the read-out circuit by at least two electric conductors. The membrane has two electrically-conductive electrodes respectively connected to the two electric conductors, and a volume of transducer material electrically connecting the two electrodes. The read-out circuit is configured to apply an electrical stimulus between the two electrodes of the membrane and to form an electric signal as a response to said application.
    Type: Grant
    Filed: November 18, 2016
    Date of Patent: January 16, 2018
    Assignee: ULIS
    Inventors: Sébastien Cortial, Michel Vilain
  • Publication number: 20170207265
    Abstract: A method of manufacturing a detector capable of detecting a wavelength range [?8; ?14] centered on a wavelength ?10, including: forming said device on a substrate by depositing a sacrificial layer totally embedding said device; forming, on the sacrificial layer, a cap including first, second, and third optical structures transparent in said range [?8; ?14], the second and third optical structures having equivalent refraction indexes at wavelength ?10 respectively greater than or equal to 3.4 and smaller than or equal to 2.3; forming a vent of access to the sacrificial layer through a portion of the cap, and then applying, through the vent, an etching to totally remove the sacrificial layer.
    Type: Application
    Filed: January 6, 2017
    Publication date: July 20, 2017
    Applicants: Ulis, Commissariat A L'Energie Atomique Et Aux Energies Alternatives
    Inventors: Michel VILAIN, Jérôme FAVIER, Jean-Jacques YON, Laurent FREY
  • Publication number: 20170167922
    Abstract: A bolometric detection device includes a substrate having a read-out circuit. The device also includes an array of elementary detectors each including a membrane suspended above the substrate and connected to the read-out circuit by at least two electric conductors. The membrane has two electrically-conductive electrodes respectively connected to the two electric conductors, and a volume of transducer material electrically connecting the two electrodes. The read-out circuit is configured to apply an electrical stimulus between the two electrodes of the membrane and to form an electric signal as a response to said application.
    Type: Application
    Filed: November 18, 2016
    Publication date: June 15, 2017
    Inventors: Sébastien Cortial, Michel Vilain
  • Patent number: 9442020
    Abstract: A method for detecting infrared radiation includes the steps of: providing a resistive bolometer retina including a plurality of resistive bolometers suspended above a substrate of a bolometric detector; acquiring the infrared radiation by the resistive bolometer retina to produce a plurality of raw read signals provided by the bolometers; correcting a response dispersion of the resistive bolometers in the raw read signals using a gain table, each gain of the gain table being associated with a bolometer of the resistive bolometer retina.
    Type: Grant
    Filed: February 20, 2013
    Date of Patent: September 13, 2016
    Assignee: ULIS
    Inventors: Alain Durand, Michel Vilain, Christophe Minassian
  • Patent number: 9243960
    Abstract: A method for detecting infrared radiation by using an array of bolometers. The following steps are used to read a bolometer of the array of bolometers: biasing the bolometer at a predetermined voltage in order to make current flow through the bolometer; subtracting a common-mode current from the current that flows through the bolometers; and producing a voltage by integrating the difference between the current that flows through the bolometers and the common-mode current.
    Type: Grant
    Filed: January 29, 2014
    Date of Patent: January 26, 2016
    Assignee: ULIS
    Inventors: Benoît Dupont, Michel Vilain
  • Patent number: 8987668
    Abstract: An infrared detector including an array of detection bolometers each having a bolometric membrane suspended above a substrate, and associated with each bolometer: a detection branch, including the bolometer and a circuit performing a biasing according to a voltage set point, a compensation branch, including a compensation bolometer thermalized to the substrate, a circuit performing a biasing according to a voltage set point, an integrator for generating a voltage by integrating a difference between the currents flowing through said branches, a circuit generating a quantity depending on substrate temperature, including: a bolometer thermalized to the substrate, and a circuit for biasing the bolometer, and a circuit for generating the voltage set points according to said quantity. When the array is exposed to a uniform reference scene, the average of the differences between currents flowing through said branches is within the integrator dynamic range for a substrate temperature range from ?30° C.-90° C.
    Type: Grant
    Filed: February 18, 2014
    Date of Patent: March 24, 2015
    Assignee: ULIS
    Inventors: Michel Vilain, Patrick Robert
  • Patent number: 8866082
    Abstract: This electromagnetic radiation detector consists of a plurality of elementary detection micro-sites, each including a micro-detector provided with a membrane (2) that is sensitive to the radiation in question and each being provided in a micro-cavity or micro-capsule defined by a substrate (1), by an upper wall (5) used as a window that is transparent to said radiation and by side walls (4), said membrane (2) being suspended above substrate (1) by means of at least two support arms (6) that include an electrically conducting layer (17), with the ends of said arms (6) being anchored in side walls (4).
    Type: Grant
    Filed: October 6, 2009
    Date of Patent: October 21, 2014
    Assignee: ULIS
    Inventor: Michel Vilain
  • Publication number: 20140239180
    Abstract: An infrared detector including an array of detection bolometers each having a bolometric membrane suspended above a substrate, and associated with each bolometer: a detection branch, including the bolometer and a circuit performing a biasing according to a voltage set point, a compensation branch, including a compensation bolometer thermalized to the substrate, a circuit performing a biasing according to a voltage set point, an integrator for generating a voltage by integrating a difference between the currents flowing through said branches, a circuit generating a quantity depending on substrate temperature, including: a bolometer thermalized to the substrate, and a circuit for biasing the bolometer, and a circuit for generating the voltage set points according to said quantity. When the array is exposed to a uniform reference scene, the average of the differences between currents flowing through said branches is within the integrator dynamic range for a substrate temperature range from ?30° C.-90° C.
    Type: Application
    Filed: February 18, 2014
    Publication date: August 28, 2014
    Applicant: ULIS
    Inventors: Michel Vilain, Patrick Robert
  • Publication number: 20140183364
    Abstract: A method for detecting infrared radiation by using an array of bolometers. The following steps are used to read a bolometer of the array of bolometers: biasing the bolometer at a predetermined voltage in order to make current flow through the bolometer; subtracting a common-mode current from the current that flows through the bolometers; and producing a voltage by integrating the difference between the current that flows through the bolometers and the common-mode current.
    Type: Application
    Filed: January 29, 2014
    Publication date: July 3, 2014
    Applicant: ULIS
    Inventors: Benoît DUPONT, Michel VILAIN
  • Patent number: 8704180
    Abstract: An infrared radiation detection device comprising: a substrate; a matrix of at least one line of elements for detecting the radiation, each comprising a resistive imaging bolometer, the matrix being formed above the substrate; a bolometer reading circuit, a temperature measuring device for measuring the temperature in at least one point of the substrate; and a compensation circuit and data processing device for correcting the signal formed from each bolometer as a function of the temperature measured in at least one point of the substrate. The compensation circuit and data processing device capable of correcting the signal formed from the imaging bolometer by using a predetermined physical model of the temperature behavior of the signal.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: April 22, 2014
    Assignee: Ulis
    Inventors: Benoît Dupont, Aurélie Touvignon, Michel Vilain, Antoine Dupret
  • Patent number: 8674307
    Abstract: A device for detecting infrared radiation comprising an array of bolometers for detecting radiation; and in order to read each bolometer, a signal shaping circuitry comprising: a circuitry capable of biasing the bolometer at a predetermined voltage in order to make current flow therethrough; a circuitry capable of generating a common-mode current; and a circuitry capable of integrating the difference between the current that flows through the bolometer and the common-mode current. According to the invention, the device comprises a circuitry capable of injecting current into each bolometer in order to shift its resistance by a predetermined quantity that depends on its offset, current injection being performed prior to readout biasing of the bolometer and the shift being performed according to the direction in which the bolometer's resistance varies as a function of temperature. In addition, correction circuitry is capable of shifting the resistances of bolometers towards a common value.
    Type: Grant
    Filed: October 20, 2011
    Date of Patent: March 18, 2014
    Assignee: Ulis
    Inventors: Benoît Dupont, Michel Vilain
  • Publication number: 20120211657
    Abstract: An infrared radiation detection device comprising: a substrate; a matrix of at least one line of elements for detecting said radiation, each comprising a resistive imaging bolometer, said matrix being formed above the substrate; means for reading the bolometers of the matrix, means for measuring the temperature in at least one point of the substrate; and means for correcting the signal formed from each bolometer as a function of the temperature measured in at least one point of the substrate. The correcting means are capable of correcting the signal formed from the imaging bolometer by means of a predetermined physical model of the temperature behaviour of said signal.
    Type: Application
    Filed: March 9, 2012
    Publication date: August 23, 2012
    Applicant: Ulis
    Inventors: Benoit Dupont, Aurélie Touvignon, Michel Vilain, Antoine Dupret
  • Patent number: 8232524
    Abstract: A detector for detecting electromagnetic radiation includes a substrate and at least one microstructure including a radiation-sensitive membrane extending substantially opposite and away from the substrate. The membrane is mechanically attached to at least two longilinear, collinear retention elements, at least one of which is mechanically connected to the substrate by an intermediate post. The membrane is in electrical continuity with the substrate. At least two collinear legs are attached to each other at the level of their ends which are attached to the membrane by a mechanical connector which is substantially co-planar with the legs and membrane. The other end of at least one of the legs is integral with a rigid cross piece which is substantially co-planar with the legs and extends substantially at right angles relative to the main dimension of the legs. The cross piece is integral with the post which is integral with the substrate.
    Type: Grant
    Filed: March 5, 2009
    Date of Patent: July 31, 2012
    Assignee: ULIS
    Inventor: Michel Vilain
  • Patent number: 8158942
    Abstract: A device for detecting infrared radiation including a matrix of resistive imaging bolometers above a substrate, a read circuit forming an analog electrical signal constituting an image of the infrared radiation impinging on the matrix, a probe for measuring the temperature of the substrate, an ADC for converting the analogue electrical signals from the read circuit and probe, and a data processing unit for correcting the signal formed by the read circuit according digital values NC(i,j) corresponding to electrical signals from the bolometers exposed to a uniform scene at the measured temperature of the substrate. The data processing unit including a unit for computing the digital values NC(i,j) based on a single set of parameters of a predetermined physical model of the read circuit electrical signals and corresponding to the exposure of the matrix of imaging bolometers to a temperature substantially equal to the measured substrate temperature.
    Type: Grant
    Filed: November 30, 2010
    Date of Patent: April 17, 2012
    Assignee: Ulis
    Inventors: Benoît Dupont, Aurélie Touvignon, Michel Vilain, Antoine Dupret
  • Publication number: 20120037805
    Abstract: A device for detecting infrared radiation comprising an array of bolometers for detecting radiation; and in order to read each bolometer, a signal shaping circuitry comprising: a circuitry capable of biasing the bolometer at a predetermined voltage in order to make current flow therethrough; a circuitry capable of generating a common-mode current; and a circuitry capable of integrating the difference between the current that flows through the bolometer and the common-mode current. According to the invention, the device comprises a circuitry capable of injecting current into each bolometer in order to shift its resistance by a predetermined quantity that depends on its offset, current injection being performed prior to readout biasing of the bolometer and the shift being performed according to the direction in which the bolometer's resistance varies as a function of temperature. In addition, correction circuitry is capable of shifting the resistances of bolometers towards a common value.
    Type: Application
    Filed: October 20, 2011
    Publication date: February 16, 2012
    Applicant: Ulis
    Inventors: Benoit DUPONT, Michel Vilain
  • Patent number: 8080793
    Abstract: A device for detecting infrared radiation including a resistive imaging bolometer intended to be electrically connected to a circuit for measuring a resistance of the imagine bolometer, whereby the device initially controls and adjusts the resistance of the imaging bolometer by injecting current into the imaging bolometer.
    Type: Grant
    Filed: December 2, 2008
    Date of Patent: December 20, 2011
    Assignee: ULIS
    Inventors: Benoît Dupont, Michel Vilain
  • Patent number: 7999227
    Abstract: This electromagnetic radiation detector comprises a reflecting substrate and at least one detection element comprising a membrane sensitive to said radiation and suspended above the substrate. The distance between the membrane and at least one detection element and the substrate is variable, said distance having a predefined spatial distribution suitable for minimizing the rapid variations of a response of the radiation detector in at least one predefined wavelength range.
    Type: Grant
    Filed: July 10, 2008
    Date of Patent: August 16, 2011
    Assignee: ULIS
    Inventor: Michel Vilain
  • Patent number: 7999229
    Abstract: The invention relates to a device for detecting an electromagnetic radiation comprising a resistive imaging bolometer sensitive to the electromagnetic radiation to be detected, intended to be connected electrically to a signal shaping circuit, and a resistive common mode rejection bolometer that is associated electrically with the imaging bolometer, so that the current flowing through the common mode rejection bolometer is subtracted from the current flowing through the imaging bolometer, wherein it comprises means for controlling the resistance of the common mode rejection bolometer by injecting current therein.
    Type: Grant
    Filed: December 5, 2008
    Date of Patent: August 16, 2011
    Assignee: ULIS
    Inventors: Beno{hacek over (i)}t Dupont, Michel Vilain
  • Publication number: 20110141286
    Abstract: This electromagnetic radiation detector consists of a plurality of elementary detection micro-sites, each including a micro-detector provided with a membrane (2) that is sensitive to the radiation in question and each being provided in a micro-cavity or micro-capsule defined by a substrate (1), by an upper wall (5) used as a window that is transparent to said radiation and by side walls (4), said membrane (2) being suspended above substrate (1) by means of at least two support arms (6) that include an electrically conducting layer (17), with the ends of said arms (6) being anchored in side walls (4).
    Type: Application
    Filed: October 6, 2009
    Publication date: June 16, 2011
    Applicant: ULIS
    Inventor: Michel Vilain