Patents by Inventor Michel X. M. deBrebisson

Michel X. M. deBrebisson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing integrated circuits by means of a multilayer mask
    Patent number: 4368573
    Abstract: A method of manufacturing integrated circuits by means of a multilayer mask.Etching of the layers of the mask comprises a lateral etching of the bottom layer so that at the edge of the auxiliary layer edges appear which are removed partly prior to forming an insulating layer and partly after the formation thereof, after which a remainder of a mask portion is also removed as a result of which removal apertures for the formation of zones are determined.
    Type: Grant
    Filed: April 14, 1980
    Date of Patent: January 18, 1983
    Assignee: U.S. Philips Corporation
    Inventors: Michel X. M. deBrebisson, Marc Tessier