Abstract: A method of manufacturing a redistribution layer includes: forming an insulating layer on a wafer, delimited by a top surface and a bottom surface in contact with the wafer; forming a conductive body above the top surface of the insulating layer; forming a first coating region extending around and above the conductive body, in contact with the conductive body, and in contact with the top surface of the insulating layer in correspondence of a bottom surface of the first coating region; applying a thermal treatment to the wafer in order to modify a residual stress of the first coating region, forming a gap between the bottom surface of the first coating region and the top surface of the insulating layer; forming, after applying the thermal treatment, a second coating region extending around and above the first coating region, filling said gap and completely sealing the first coating region.

Abstract: In one embodiment, a method of manufacturing semiconductor devices including metallizations (e.g. a Re-Distribution Layer—RDL metallizations) includes providing a capping stack onto the metallizations. The stack includes a pair of nickel layers having therebetween a layer of ductile material such as palladium or gold.