Patents by Inventor Michelle Alejandra Wong

Michelle Alejandra Wong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Front surface and back surface orientation detection of transparent substrate
    Patent number: 11728191
    Abstract: A system includes a substrate support on which to receive a transparent substrate, a non-contact sensor adapted to detect and image a dot pattern etched on a front surface of the transparent substrate, and a processing device attached to the non-contact sensor. The processing device may determine, using imaging data from the non-contact sensor, an orientation of a right-angled edge of the dot pattern. The processing device may determine, based on the orientation of the right-angled edge, whether a front surface of the transparent substrate is facing up or facing down. The processing device may also direct a robot to transfer the transparent substrate to a processing chamber dependent on whether the front surface of the transparent substrate is facing up or facing down.
    Type: Grant
    Filed: May 5, 2020
    Date of Patent: August 15, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Michelle Alejandra Wong, Sanjay Rajaram
  • FRONT SURFACE AND BACK SURFACE ORIENTATION DETECTION OF TRANSPARENT SUBSTRATE
    Publication number: 20210351050
    Abstract: A system includes a substrate support on which to receive a transparent substrate, a non-contact sensor adapted to detect and image a dot pattern etched on a front surface of the transparent substrate, and a processing device attached to the non-contact sensor. The processing device may determine, using imaging data from the non-contact sensor, an orientation of a right-angled edge of the dot pattern. The processing device may determine, based on the orientation of the right-angled edge, whether a front surface of the transparent substrate is facing up or facing down. The processing device may also direct a robot to transfer the transparent substrate to a processing chamber dependent on whether the front surface of the transparent substrate is facing up or facing down.
    Type: Application
    Filed: May 5, 2020
    Publication date: November 11, 2021
    Inventors: Michelle Alejandra Wong, Sanjay Rajaram