Patents by Inventor Michelle Lacomb Novak

Michelle Lacomb Novak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CONFORMAL YTTRIUM OXIDE COATING
    Publication number: 20220403531
    Abstract: Exemplary methods of coating a semiconductor component substrate may include submerging the semiconductor component substrate in an alkaline electrolyte. The alkaline electrolyte may include yttrium. The methods may include igniting a plasma at a surface of the semiconductor component substrate for a period of time less than or about 12 hours. The methods may include forming a yttrium-containing oxide on the semiconductor component substrate. A surface of the yttrium-containing oxide may be characterized by a yttrium incorporation of greater than or about 10 at. %.
    Type: Application
    Filed: June 17, 2021
    Publication date: December 22, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Tony S. Kaushal, Michelle Lacomb Novak