Patents by Inventor Michiaki Saito

Michiaki Saito has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • COMPOSITE FILTER DEVICE
    Publication number: 20240014806
    Abstract: A composite filter device includes first and second filter chips mounted on an upper surface of a substrate by first and second conductive bonds. The first filter chip includes a longitudinally coupled resonator filter. The second filter chip does not include a longitudinally coupled resonator filter. A height of the first conductive bond is lower than a height of the second conductive bond.
    Type: Application
    Filed: September 21, 2023
    Publication date: January 11, 2024
    Inventors: Michiaki SAITO, Junpei YASUDA
  • Beam output control method, beam output apparatus and exposure system, and device manufacturing method using the exposure system
    Patent number: 6542222
    Abstract: The present invention relates to a beam output control method in which an output from a pulse energy source that emits pulses of exposure beam used in an exposure apparatus is controlled. This method controls an output from the pulse energy source by changing a control mode in accordance with an operation of the exposure apparatus.
    Type: Grant
    Filed: July 27, 2000
    Date of Patent: April 1, 2003
    Assignee: Nikon Corporation
    Inventors: Toshihiko Tsuji, Michiaki Saito