Patents by Inventor Michiaki Yamagata

Michiaki Yamagata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4771639
    Abstract: A pressure sensor which uses a tapered shearing piezoresistance type gage to obtain high output. The components are fabricated to produce a surface of the gage which is protected by an oxide film which is turned into phosphorated silicate glass; a sensor surface which has an MOS structure with a silicon substrate; oxide film and polycrystalline silicon film; with the polycrystalline silicon film being fixed at a potential higher than maximum potential generated by the shearing gate, and the surface of the piezoresistance element are where P-type impurity is diffused to a low density being inverted. Thus, the shearing gage is operated substantially in a bulk, and influence due to impurity ion from an external source is removed. Furthermore, the pressure sensor buffers stress arising within the sensor by use of the polycrystalline silicon film, prevents occurrence of local stress by keeping the passivation film from dropping in surface level, thereby minimizing zero offset of the output and drift.
    Type: Grant
    Filed: September 2, 1987
    Date of Patent: September 20, 1988
    Assignee: Yokogawa Electric Corporation
    Inventors: Tokuji Saigusa, Michiaki Yamagata, Toshio Aga