Patents by Inventor Michiel Kruger

Michiel Kruger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of and apparatuses for maintenance, diagnosis, and optimization of processes
    Publication number: 20070055403
    Abstract: One aspect of the present invention is a method of monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. Another aspect of the present invention is a system configured for monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. One embodiment of the present invention includes a software program that can be implemented in a computer for optimizing the performance of a process tool for processing a workpiece.
    Type: Application
    Filed: July 11, 2005
    Publication date: March 8, 2007
    Inventors: Paul MacDonald, Michiel Kruger, Michael Welch, Mason Freed, Costas Spanos