Patents by Inventor Michiel Matthieu BRUININK

Michiel Matthieu BRUININK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • STACK ALIGNMENT TECHNIQUES
    Publication number: 20230020745
    Abstract: Disclosed herein is a substrate stack comprising a plurality of substrates, wherein: each substrate in the substrate stack comprises at least one alignment opening set; the at least one alignment opening set in each substrate is aligned for a light beam to pass through corresponding alignment openings in each substrate; and each substrate comprises at least one alignment opening that has a smaller diameter than the corresponding alignment openings in the other substrates.
    Type: Application
    Filed: September 23, 2022
    Publication date: January 19, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Arjen Benjamin STORM, Johan Frederik Cornelis VAN GURP, Johannes Cornelis Jacobus DE LANGEN, Aaron Yang-Fay AYAL, Michiel Matthieu BRUININK, Christiaan Ruben VAN DEN BERG, Christiaan OTTEN, Laura DINU GURTLER, Marc SMITS