Abstract: The invention relates to a method and device of inspecting contamination particles on an object comprising a patterned structure. The device includes a radiation system for directing a radiation beam to the object. The object is configured to scatter the beam. The device also includes an optical system arranged to receive scattered radiation from the object, and a filter provided in the optical system. The filter is associated with the patterned structure so as to filter out radiation from the scattered radiation. The device also includes a detector arranged to detect a fraction of radiation that is transmitted by the filter. Accordingly, contamination particles may be detected quickly and accurately.

Abstract: A method for separating a lump piece of rosette plants. The method includes the steps of gripping a rosette plant and positioning it parallel to a longitudinal axis of an elongated holder which has a longitudinal opening at least along the longitudinal axis; introducing a part of the lump piece of the rosette plant into the holder via the mentioned longitudinal opening; cutting off the lump piece along a cutting plane parallel to the longitudinal axis, while closing the longitudinal opening, such that the introduced part of the lump piece is enclosed in the holder; and removing the enclosed cut-off part of the lump piece from the holder. The method includes the further step of cutting off a part of the rosette plant enclosed in the holder along a second cutting plane.