Patents by Inventor Michiel Stoets

Michiel Stoets has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program
    Publication number: 20050102723
    Abstract: Scheduling of tasks in a lithographic apparatus, track unit or lithocell is performed by maintaining a register of the state of the machine and a database of tasks performable by the machine, generating possible sequences of tasks based on pre- and post-conditions on the system state (rather than a precedence relation) and selecting a sequence from the generated sequences that meets a given beginning state of the machine and a desired end state. Embodiments of the invention also allow for automated recovery from exceptions.
    Type: Application
    Filed: September 30, 2004
    Publication date: May 12, 2005
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Norbertus Josephus Van Den Nieuwelaar, Willem Herman Gertruda Koenen, Johannes Onvlee, Henricus Petrus Van Lierop, Robert Dumont, Jacobus Rooda, Michiel Stoets