Patents by Inventor Michiel V. P. Krüger

Michiel V. P. Krüger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of and apparatuses for maintenance, diagnosis, and optimization of processes
    Patent number: 7580767
    Abstract: One aspect of the present invention is a method of monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. Another aspect of the present invention is a system configured for monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. One embodiment of the present invention includes a software program that can be implemented in a computer for optimizing the performance of a process tool for processing a workpiece.
    Type: Grant
    Filed: July 11, 2005
    Date of Patent: August 25, 2009
    Assignee: KLA-Tencor Corporation
    Inventors: Paul Douglas MacDonald, Michiel V. P. Krüger, Michael Welch, Mason L. Freed, Costas J. Spanos