Patents by Inventor Michiko Tsumura

Michiko Tsumura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Testing apparatus
    Patent number: 11090694
    Abstract: A testing apparatus according to an embodiment includes a chamber, a probe card including probes exposed in the chamber, a stage supporting a test target object in the chamber, a moving mechanism to move the stage between a testing position where the test target object is in contact with the probes and a cleaning position where the test target object is arranged away from the probes in a horizontal direction, and an air tube introducing first dry air into the chamber through the probe card when the stage is placed at the cleaning position.
    Type: Grant
    Filed: March 11, 2019
    Date of Patent: August 17, 2021
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Tomoko Fujiwara, Takao Sueyama, Keiko Kaneda, Michiko Tsumura
  • TESTING APPARATUS
    Publication number: 20200030856
    Abstract: A testing apparatus according to an embodiment includes a chamber, a probe card including probes exposed in the chamber, a stage supporting a test target object in the chamber, a moving mechanism to move the stage between a testing position where the test target object is in contact with the probes and a cleaning position where the test target object is arranged away from the probes in a horizontal direction, and an air tube introducing first dry air into the chamber through the probe card when the stage is placed at the cleaning position.
    Type: Application
    Filed: March 11, 2019
    Publication date: January 30, 2020
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventors: Tomoko FUJIWARA, Takao Sueyama, Keiko Kaneda, Michiko Tsumura