Patents by Inventor Michimasa Terada

Michimasa Terada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mechanism for turning over a test head of a wafer probing machine
    Patent number: 4875005
    Abstract: A mechanism according to the present invention comprises a quadric crank chain disposed substantially within a vertical plane to support a test head of wafer probing machine, a cylinder mechanism coupled to a first movable link corresponding to the side opposite to a fixed link of the quadric crank chain, the cylinder mechanism serving to slide the first movable link in a vertical direction, and a guide member for supportingly guiding the cylinder mechanism in a horizontal direction. The test head is attached to a second movable link, which corresponds to a side adjacent to the fixed link of the quadric crank chain, so that the test head, along with the second movable link, revolves within the vertical plane when the first movable link slides vertically.
    Type: Grant
    Filed: August 5, 1988
    Date of Patent: October 17, 1989
    Assignee: Tokyo Electron Limited
    Inventors: Michimasa Terada, Hisashi Nakajima