Abstract: A fluid control valve and manufacturing method thereof, wherein, when a pressing force acts on the engagement surface between a diaphragm member and a valve seat-contacting member, the valve seat-contacting member is not displaced and no gap is formed. The diaphragm member made of a first fluorine-based resin material is provided with a diaphragm membrane and a rod-shaped part in the center of the diaphragm membrane. The valve seat-contacting member made of an injection-moldable second fluorine-based resin material is provided with a ring-shaped sealing surface and a recess on the opposite side from the ring-shaped sealing surface. The rod-shaped part is partly fitted into the recess. A ring-shaped recessed is formed on outer circumference of a portion of the rod-shaped part. A small diameter recess is formed on the inner circumference of the recess. The ring-shaped recess section and the small diameter recess adhere closely to form the engagement surface.

Abstract: A fluid control valve and manufacturing method thereof, wherein, when a pressing force acts on the engagement surface between a diaphragm member and a valve seat-contacting member, the valve seat-contacting member is not displaced and no gap is formed. The diaphragm member made of a first fluorine-based resin material is provided with a diaphragm membrane and a rod-shaped part in the center of the diaphragm membrane. The valve seat-contacting member made of an injection-moldable second fluorine-based resin material is provided with a ring-shaped sealing surface and a recess on the opposite side from the ring-shaped sealing surface. The rod-shaped part is partly fitted into the recess. A ring-shaped recessed is formed on outer circumference of a portion of the rod-shaped part. A small diameter recess is formed on the inner circumference of the recess. The ring-shaped recess section and the small diameter recess adhere closely to form the engagement surface.

Abstract: A diaphragm having chemical resistance is disclosed. The diaphragm includes a membrane portion and a connection portion which enables connection of the membrane portion to another member. The membrane portion is formed of a first material having chemical resistance. The connection portion is formed of a second material whose main material is the same as that of the first material. The membrane portion and the connection portion are directly bonded together.

Abstract: A fluid control valve includes: a drive section; body provided with first port, second port, and valve seat; and valve element formed columnar-shaped and coupled with the drive section, and the valve element includes annular sealing protrusion annularly protruding from end face located on side facing the valve seat, the sealing protrusion being provided at leading end with annular sealing portion to be pressed against the valve seat for sealing and at least the annular sealing protrusion is made of fluororesin. The valve element is configured such that the annular sealing portion is radially displaced with displacement amount of no more than 6.175 ?m when the annular sealing portion is pressed against the valve seat by the drive section so that abrasion caused by deformation of the valve element in valve closing is restrained and generation of particles is prevented.

Abstract: A diaphragm having chemical resistance is disclosed. The diaphragm includes a membrane portion and a connection portion which enables connection of the membrane portion to another member. The membrane portion is formed of a first material having chemical resistance. The connection portion is formed of a second material whose main material is the same as that of the first material. The membrane portion and the connection portion are directly bonded together.

Abstract: A fluid control valve includes: a drive section; body provided with first port, second port, and valve seat; and valve element formed columnar-shaped and coupled with the drive section, and the valve element includes annular sealing protrusion annularly protruding from end face located on side facing the valve seat, the sealing protrusion being provided at leading end with annular sealing portion to be pressed against the valve seat for sealing and at least the annular sealing protrusion is made of fluororesin. The valve element is configured such that the annular sealing portion is radially displaced with displacement amount of no more than 6.175 ?m when the annular sealing portion is pressed against the valve seat by the drive section so that abrasion caused by deformation of the valve element in valve closing is restrained and generation of particles is prevented.

Abstract: In a fluid control valve, a valve part houses a diaphragm in a valve body including a valve seat, first and second ports, and a drive part includes a piston dividing a piston chamber in a cylinder body into first and second chambers, and a rubber sealing member attached to the outer peripheral surface of the piston. A constriction is provided between the piston chamber and the surface of the cylinder body contacting the valve body. The cylinder body is formed with an exhaust port communicating with the first chamber, an operation port communicating with the second chamber, and a purge port communicating with a fluid non-contact chamber. The piston is formed with a flow path which enables communication between the first chamber and the fluid non-contact chamber. Accordingly, a temperature increase of the drive part can be restricted, and degradation of internal parts can be prevented.

Abstract: A fluid control valve includes a resin valve body formed with first and second passages, a resin valve upper part connected to an upper surface of the valve body, and a resin diaphragm valve element held between the valve body and the valve upper part.

Abstract: In a liquid drip prevention valve, an input port is formed in the upper face of a flow passage block, and an output port is formed in the lower face, which opposes the upper face of the flow passage block. In addition, a valve chamber is formed on a side face of the flow passage block, and an air block abuts the side face. Furthermore, a diaphragm valve makes contact with a valve seat when pressure is applied with respect to a back side chamber of the diaphragm valve and separates from the valve seat when the back side chamber is brought to negative pressure, thus forming the liquid drip prevention valve.

Abstract: In a fluid control valve, a valve part houses a diaphragm in a valve body including a valve seat, first and second ports, and a drive part includes a piston dividing a piston chamber in a cylinder body into first and second chambers, and a rubber sealing member attached to the outer peripheral surface of the piston. A constriction is provided between the piston chamber and the surface of the cylinder body contacting the valve body. The cylinder body is formed with an exhaust port communicating with the first chamber, an operation port communicating with the second chamber, and a purge port communicating with a fluid non-contact chamber. The piston is formed with a flow path which enables communication between the first chamber and the fluid non-contact chamber. Accordingly, a temperature increase of the drive part can be restricted, and degradation of internal parts can be prevented.

Abstract: A fluid control valve includes a resin valve body formed with first and second passages, a resin valve upper part connected to an upper surface of the valve body, and a resin diaphragm valve element held between the valve body and the valve upper part.