Abstract: As passages forming a main gas passage, each of the passage blocks 3 has a first inverted-V passage, a first outlet passage communicating between the apex of the first inverted-V passage and an outlet of a first on-off valve. As passages forming a vent gas passage, each of the passage blocks 3 has a second inverted-V passage and a second outlet passage communicating between the apex of the second inverted-V passage and an outlet of a second on-off valve. As passages forming a first sub-gas inflow passage, each of the passage blocks has a first inlet passage leading to an inlet of the first on-off valve and a common inlet passage. As passages forming a second sub-gas inflow passage, each of the passage blocks has a second inlet passage leading to an inlet of the second on-off valve and a communication path continued to the common inlet passage.

Abstract: A bolt-locking apparatus includes a plurality of fitting members 2 and 3 which are relatively non-rotatably fitted to heads of a plurality of bolts 5, and an engaging member 4 fitted to the plurality of fitting members 2 and 3 such that the engaging member 4 straddles the fitting members 2 and 3. Outer peripheral surfaces 2b and 3b of the fitting members 2 and 3 are non-circular in shape. The engaging member 4 includes a plurality of engaging holes (non-circular engaging portions) 8a and 8b which correspond to the non-circular outer peripheral surfaces 2b and 3b of the plurality of fitting members 2 and 3.

Abstract: A plurality of stacked and fixed gas supplying units U, each gas supplying unit U having at least four gas supply lines S is formed by opposingly combining and fixing two flow controllers 3, each flow controller 3 provided with a plurality of flow control units, to a gas inlet-side block 12 and a gas outlet-side block 13 that are disposed in parallel across an interval in plan view and providing each flow controller 3 with an inlet opening and closing valve 1 and an outlet opening and closing valve 5.

Abstract: Provided is a diaphragm valve in which seat leak occurrence is drastically decreased. A depression 14 is provided at a radially middle part of a top of the seat 11. A first seal portion 17 is provided between a diaphragm 6 and a radially inward part 15 of the top of the seat 11. A second seal portion 18 is provided between a diaphragm 6 and a radially outward part 16 of the top of the seat 11. An outer circumferential surface 14b of the depression 14 has a cylindrical surface.

Abstract: A pipe joint for preventing fine particles generated when a male threaded member and a female threaded member are threadedly engaged with each other from entering a fluid passage thus maintaining a high degree of cleanliness. Joint members are joined to each other by a male threaded member formed on one joint member and a female threaded member formed on the other joint member. A cover portion which covers outer peripheral surfaces of abutting portions of both joint members is formed on the male threaded member.

Abstract: Provided are a fixing device for a lower-stage member which facilitates a leveling operation for making upper surfaces of lower-stage members coplanar, and can further enhance a vibration absorbing effect generated by an elastic member, and a fluid control device which includes the fixing device. A fixing device for a lower-stage member is configured such that respective lower-stage members are fixed once and, thereafter, a desired lower-stage member is moved upwardly against an elastic force so as to finely adjust positions of upper surfaces of a plurality of lower-stage members. The elastic member is formed of an annular body made of rubber or a synthetic resin. A cutout which imparts the elastic deformation by bending when a force in the vertical direction is applied to the elastic member is formed on an upper portion and a lower portion of an inner peripheral surface of the elastic member.

Abstract: There is provided a fluid controller actuator which does not require a plurality of bolts for fixing an inner side spring presser to a casing, in which a configuration is simple and a biasing force of an biasing member can be adjusted from the outside after the assembly. An inner side spring presser includes a shaft portion and a cylinder portion provided at a lower edge portion of the shaft portion, and presses an upper side peripheral edge portion of a through hole of a biasing member by a lower end of the cylinder portion. The shaft portion penetrates an outer side spring presser and extends upwardly. An adjustment screw which positions the inner side spring presser as a lower end abuts against an upper surface of the shaft portion of the inner side spring presser, is screwed to a top wall of a casing.

Abstract: A vacuum valve is provided with opening pressure setting means that sets a set value of a fluid pressure in a primary side passage beyond which communication is opened and forcible opening means that forcibly opens communication regardless of the fluid pressure in the primary side passage. The opening pressure setting means includes a spring receiver fixed to a stem, a compression coil spring having a lower end supported by the spring receiver, and an adjustment screw, movable in the axial direction, that presses the upper end of the compression coil spring. The forcible opening means includes a piston inserted onto the stem 5 under the spring receiver so as to be movable upward and downward and piston driving means that moves the piston and the spring receiver upward integrally by moving the piston upward using compressed air.

Abstract: A pipe joint includes first and second joint members having fluid channels communicating with each other, an annular gasket to be interposed between abutting end surfaces of the both joint members, and a nut configured to couple the joint members. The nut is provided with an inner surface treated layer. The inner surface treated layer includes a Co (cobalt)-P (phosphorous) alloy metal coating provided on an inner surface of the nut and a fluorine coating provided on the surface of the alloy metal coating.

Abstract: An inline concentration meter includes a light source unit emitting mixed light containing at least two wavelengths with a phase difference, a detecting unit including a light incident part for entering the mixed light emitted from the light source unit into a fluid passage of a detector body and at least two light detection parts receiving the mixed light passed through the fluid passage, a computing processor unit conducting frequency analyses of detection signals of the mixed light output from the respective light detection parts and computing variations of intensities of the detection signals corresponding to absorbances in at least two frequency ranges to compute a concentration of fluid in the fluid passage based on the variations of the intensities of the detection signals, and a recording/displaying unit recording and displaying a value of the fluid concentration computed at the computing processor unit.

Abstract: Provided is a diaphragm valve whose durability is improved by proper caulking. On a bottom surface 2d of a depression 2c of a body 2, an annular inner projection 22 having a relatively small diameter and an annular outer projection 23 having a relatively large diameter are provided. A seat 5 is made of synthetic resin and is inserted between the inner projection 22 and the outer projection 23. Both projections 22, 23 are caulked, whereby the seat 5 is prevented from coming off. The height of the inner projection 22 is less than that of the outer projection 23, and a corner 22a on the outside of the inner projection 22 has a curved surface.

Abstract: There is provided a diaphragm valve capable of reliably detecting damage to a diaphragm before breakage of the diaphragm in spite of the simple structure. A diaphragm includes a plurality of diaphragm layers. The uppermost diaphragm layer is provided with wiring. An abnormality of the diaphragm is detected by detecting breakage of the wiring.

Abstract: A fastening structure of a brittle-fracturable panel material includes a first fastening flange, a second fastening flange, and a light transmission window panel made of a brittle-fracturable panel material, wherein the light transmission window panel is nipped between the first fastening flange and the second fastening flange, and both fastening flanges are air-tightly fitted and fastened.

Abstract: A diaphragm valve and a seat holder unit for the diaphragm valve which allows easy replacement of a seat is provided. The diaphragm valve includes a retainer configured to hold a seat holder. The seat holder is demountably arranged on a body to hold a seat. The retainer has a substantially cylindrical shape and includes an inward flange portion receiving the outer peripheral edge portion of the seat holder, and is demountably mounted on the diaphragm holding members in a state of holding the seat holder.

Abstract: This invention is related to an optical-analysis-type raw material fluid density detector including a detector main body and a light oscillation unit and a light detection unit that are provided on the upper surface or the under surface of the detector main body, in which the detector main body has at least one recess formed in the upper surface and the under surface, a fluid flow path connecting a fluid inlet of the detector main body to the recess, a fluid flow path connecting the recesses to each other, and a fluid flow path connecting the recess to a fluid outlet of the detector main body; the light oscillation unit is disposed in the recess that is closest to the inlet; and light detection units are disposed in the remaining recesses.

Abstract: A flow control valve for a flow controller includes a valve main body provided with an open-top valve chamber hole, a metal diaphragm valve element, a lower support cylinder having notches facing each other, an upper support cylinder attached to the lower support cylinder, a support frame horizontally disposed through the notches of the lower support cylinder, a disc spring placed between the support frame and a bottom of the lower support cylinder, a lower cradle placed on the support frame, a piezoelectric element inserted into the support cylinder above the lower cradle, a guide fixed to the valve main body together with the support frame with the support cylinder being inserted through the guide cylinder in a vertically movable manner. The support cylinder is pressed upward by the extension of the piezoelectric element, whereby the metal diaphragm valve element is separated from the valve seat by the elastic force.

Abstract: There is provided a fluid controller actuator which does not require a plurality of bolts for fixing an inner side spring presser to a casing, in which a configuration is simple and assembly does not take time and effort, and further, in which a biasing force of an biasing member can be adjusted from the outside after the assembly. An inner side spring presser (15) includes a shaft portion (22) and a cylinder portion (23) provided at a lower edge portion of the shaft portion (22), and presses an upper side peripheral edge portion of a through hole (12a) of a biasing member (12) by a lower end of the cylinder portion (23). The shaft portion (22) penetrates an outer side spring presser (16) and extends upwardly. An adjustment screw (19) which positions the inner side spring presser (15) as a lower end abuts against an upper surface of the shaft portion (22) of the inner side spring presser (15), is screwed to a top wall (11d) of a casing (11).

Abstract: An object of the present invention is to provide a fluid coupling, in which a coupling member is readily retained by a retainer and the retainer is readily attached to or detached from the coupling member, and a retainer for such a fluid coupling. A retainer includes an annular gasket retaining portion for retaining a gasket therein and an annular coupling member retaining portion which has an inner diameter greater than that of the gasket retaining portion and retains one coupling member. At an inner circumference of the gasket retaining portion and an inner circumference of the coupling member retaining portion are formed annular grooves, respectively, for holding therein elastic rings, respectively.