Abstract: A measurement device for measuring a position of an object, includes an illuminator configured to illuminate the object, an image capturing device configured to capture the object illuminated by the illuminator, a calculator configured to obtain the position of the object based on an image obtained by the image capturing device, and a controller configured to control the illuminator and the image capturing unit. The controller outputs timing information indicating a timing determined in accordance with a measurement period that is an overlapping period of an illumination period for causing the illuminator to illuminate the object and an image capturing period for causing the image capturing device to capture the object.

Abstract: A measurement device for measuring a position of an object, includes an illuminator configured to illuminate the object, an image capturing device configured to capture the object illuminated by the illuminator, a calculator configured to obtain the position of the object based on an image obtained by the image capturing device, and a controller configured to control the illuminator and the image capturing unit. The controller outputs timing information indicating a timing determined in accordance with a measurement period that is an overlapping period of an illumination period for causing the illuminator to illuminate the object and an image capturing period for causing the image capturing device to capture the object.

Abstract: An image acquiring apparatus configured to acquire an image of an object, including: an imaging optical system; an image taking element; a changing mechanism configured to change a posture of the object or the image taking element; a control unit configured to calculate a control target value; and a correcting mechanism configured to correct the posture such that a reached posture approaches the target posture, wherein the control unit compares reached image data obtained as a result that the image taking element actually takes an image of a correction chart whereof drawing information is known in a state that the posture is the reached posture, and target image data which is expected to be obtained when the image taking element takes an image of the correction chart in a state that the posture is the target posture to calculate a correction value of the posture.

Abstract: A microscope includes an illumination system, a stage, and an objective lens that forms an image of a specimen. The stage includes a fixed member whose position and inclination are fixed, a specimen holding member at least one of whose position and inclination is changeable, and a supporting member that supports the specimen holding member. A connection between the supporting member and the specimen holding member and a connection between the supporting member and the fixed member reside near sides of the specimen holding member. The microscope further includes an actuator that changes at least one of the position and the inclination of the specimen holding member with respect to the fixed member, and a buffer mechanism that suppresses transmission of any changes in the inclination of the specimen holding member to the actuator. The actuator and the specimen holding member are connected with the buffer mechanism interposed therebetween.

Abstract: A lithography apparatus includes a deflector configured to deflect the charged particle beam to scan the charged particle beam on the substrate in a scan direction; a detector including a shield for shielding the charged particle beam, and configured to detect an intensity of a charged particle beam not shielded by the shield; and a processor configured to process a signal obtained with the detector scanned with the charged particle beam in the scan direction by the deflector, wherein an effective region of the shield has a shape such that a position of an edge thereof in the scan direction continuously changes along the edge, and wherein the processor is configured to process the signal with respect to a plurality of positions of the edge to determine a relationship between a command value to the deflector and a scan position of the charged particle beam.

Abstract: A microscope includes a stage that holds an object, an objective optical system that forms an image of the object, a light receiving unit that receives the image of the object, and a driving unit that moves the stage between a first position where the image of the object is taken and a second position that is different from the first position. The stage includes a nozzle from which a gas is ejected. The nozzle is provided such that the gas is ejected from the nozzle toward the objective optical system when the stage is at the second position.

Abstract: A lithography apparatus includes a deflector configured to deflect the charged particle beam to scan the charged particle beam on the substrate in a scan direction; a detector including a shield for shielding the charged particle beam, and configured to detect an intensity of a charged particle beam not shielded by the shield; and a processor configured to process a signal obtained with the detector scanned with the charged particle beam in the scan direction by the deflector, wherein an effective region of the shield has a shape such that a position of an edge thereof in the scan direction continuously changes along the edge, and wherein the processor is configured to process the signal with respect to a plurality of positions of the edge to determine a relationship between a command value to the deflector and a scan position of the charged particle beam.

Abstract: A microscope according to the present invention includes an imaging unit including a first illuminating unit, an imaging element, and a projection optical system, the first illuminating unit including a light source that illuminates a first object, the imaging element performing imaging of the first object, the projection optical system projecting an image of the first object onto the imaging element; a measuring unit configured to measure a second object for setting an imaging condition used when performing imaging of the second object at the imaging unit; and a controller configured to concurrently perform the imaging of the first object at the imaging unit and the measurement of the second object at the measuring unit.

Abstract: An image acquisition apparatus includes an image-forming optical system configured to form an image of an observation area in a plane of a subject, an image sensor including a light receiving surface configured to capture an image of the observation area formed by the image-forming optical system, and a rotation unit configured to rotate at least one of the subject and the image sensor within a plane perpendicular to an optical axis of the image-forming optical system. By driving of the rotation unit, the image acquisition apparatus changes a relative position of the observation area and the light receiving surface within the plane perpendicular to the optical axis of the image-forming optical system, to capture an image of an area in the observation area not captured at a time of image capturing before driving of the rotation unit.

Abstract: An imaging apparatus comprises: a holding unit that holds a subject; a surface profile measuring unit that measures a surface profile of the subject; an imaging unit that adjusts an imaging plane according to the surface profile measured by the surface profile measuring unit and performs imaging of the subject; and a specifying unit that specifies a presence region in which an imaging object is present from an entire region of the subject. The surface profile measuring unit measures only the surface profile of the presence region specified by the specifying unit.

Abstract: An anti-vibration mount apparatus which suppresses vibration of a structure is disclosed. The apparatus comprises a gas spring which supports the structure, and a controller which controls an internal pressure of the gas spring.

Abstract: Disclosed is an anti-vibration system, a method of controlling the same, and an exposure apparatus having the same.

Abstract: A vibration suppressing system includes a structural member with respect to which vibration suppression is to be executed, an actuator, having a pair of a fixed member and a movable member, for moving the movable member relative to the fixed member, and a first vibration sensor for measuring vibration of the structural member. A displacement sensor measures a movement distance of the movable member, a second vibration sensor measures vibration of the movable member, and a controller controls the actuator on the basis of outputs from the first vibration sensor, the displacement sensor and the second vibration sensor.

Abstract: An actuator rotatable about a support shaft rectilinearly movable along axis of a shaft and rotatably movable about the shaft includes a cylindrical magnet extending about the shaft. The cylindrical magnet has a plurality of poles in the radial direction and magnetized boundaries between poles of opposite polarity extending in a circumferential direction of the magnet and extending in an axial direction of the magnet. A plurality of yokes are provided to define magnetic poles coupled in facing relationship with the magnetic boundaries of a cylindrical magnet and having coils coupled thereto to define the magnetic poles.

Abstract: A humidity sensing apparatus which includes a humidity sensor which detects humidity as a function of impedance is provided. A reference resistor has a predetermined resistance value. A charge switching circuit selectively couples one of the reference resistor or the humidity sensor in series with a reference capacitor which has a predetermined capacitance. A voltage judging circuit determines whether the terminal voltage of the reference capacitor is high or low. A charge/discharge switch selectively charges and discharges the reference capacitor in accordance with the output of the voltage judging circuit. A sensor direction switching circuit inverts the direction of current flowing through the humidity sensor during charging of the reference capacitor. An oscillation frequency counter counts the number of charge/discharge cycles which are repeated during a predetermined time period.

Abstract: A humidity sensor including an insulating substrate, a pair of electrodes formed on the insulating substrate, and a porous silica film with carbon particles dispersed therein is formed over the insulating substrate and electrodes. A silica film may be formed over the porous silica film or directly on the porous silica film containing carbon particles, or directly on the insulating substrate with the electrodes formed thereon to increase adhesion between the porous silica film and the substrate.