Abstract: According to this invention, a dry etching method includes the step of sequentially forming an SiO.sub.2 film, an Al--Si--Cu thin film, and a photoresist on an Si substrate to sequentially form a mask pattern, the step of etching the Al--Si--Cu thin film by RIE using a gas mixture of Cl.sub.2 and BCl.sub.3 as an etching gas, and the step of removing etching residues by a sputter effect obtained by the plasma of the BCl.sub.3 gas.

Abstract: A heating cooking appliance includes a heater for the cooking, a switch generating an operation signal while being touched or depressed with a finger or the like, and a microcomputer for controlling the heater so that energization of the heater is initiated in the case where the operation signal generated by the switch is continuously input into the microcomputer for a predetermined period of time. The heater is not energized only when the switch is touched by accident or mistake. When a user depresses the switch for the predetermined period of time with the intention of initiating the cooking, the heater is energized.

Abstract: The disclosure relates to a dough stuff kneader for kneading dough stuffs contained in a container by driving an electric motor. The dough stuff kneader includes an electrical fan for inducing an air flow which is introduced into the container, thereby cooling the dough stuffs. The kneading motor is driven in accordance with a kneading command signal delivered from a microcomputer as a signal generating circuit. The electrical fan is driven in accordance with a blowing command signal delivered from a timer circuit. The timer circuit is designed so as to deliver a blowing command signal after elapse of a predetermined period of time from the time when the kneading command signal is delivered from the microcomputer.

Abstract: A bread baking apparatus includes a case having an upper open end closed and opened by a lid, a heater for heating the atmosphere in the case, a dough container disposed in the case so that a space is circumferentially defined between the case and the dough container, an electric motor for driving a kneading blade disposed in the dough container, an electric fan disposed outside the case and energized for a predetermined period during the first half of a baking step, and a microcomputer for controlling the motor, the fan and the heater.

Abstract: A kneading machine includes a kneading device for kneading a main material and a ancillary material together that are contained separately therein, a timer device for starting a kneading operation, by actuating the kneading device in accordance with a set time, a start device for actuating the timer device to start a time count, a cancel device for overriding the timer device and the start device, and a control device. The control device enables the cancel device to function for a prescribed period after the start device is operated without the time device being set. The kneading operation can thus be reset during the prescribed period, if the start device is operated by mistake.