Patents by Inventor Michitaka Morikawa

Michitaka Morikawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7439010
    Abstract: A positive type resist composition having an alkali-soluble siloxane polymer expressed by the following Formula (1), a photosensitive compound, and a 1 ?m thick resist film formed of the positive type resist composition which has 5% to 60% of transmittance to i-line radiation; in the Formula (1), R1 and R2 express a monovalent organic group, and may be identical or different; “A” is a group expressed by the following Formula (2) having at least one phenolic hydroxyl group; and “a”, “b,” and “c” satisfy the following relation; a+b+c=1, in the Formula (2), R3, R4, and R5 express one of a hydrogen atom and a monovalent organic group, and may be identical or different, “m” expresses an integer, and “n” expresses an integer of 1 to 5. Preferably, 0.25?a?0.60, and 0?c?0.25. The composition is preferably used in a resist film undergoing oxygen plasma etching.
    Type: Grant
    Filed: May 9, 2005
    Date of Patent: October 21, 2008
    Assignee: Fujitsu Limited
    Inventors: Keiji Watanabe, Miwa Kozawa, Shoichi Suda, Fumi Yamaguchi, Isao Yahagi, Michitaka Morikawa
  • Publication number: 20050221227
    Abstract: A positive type resist composition having an alkali-soluble siloxane polymer expressed by the following Formula (1), a photosensitive compound, and a 1 ?m thick resist film formed of the positive type resist composition which has 5% to 60% of transmittance to i-line radiation; in the Formula (1), R1 and R2 express a monovalent organic group, and may be identical or different; “A” is a group expressed by the following Formula (2) having at least one phenolic hydroxyl group; and “a”, “b,” and “c” satisfy the following relation; a+b+c=1, in the Formula (2), R3, R4, and R5 express one of a hydrogen atom and a monovalent organic group, and may be identical or different, “m” expresses an integer, and “n” expresses an integer of 1 to 5. Preferably, 0.25?a?0.60, and 0?c?0.25. The composition is preferably used in a resist film undergoing oxygen plasma etching.
    Type: Application
    Filed: May 9, 2005
    Publication date: October 6, 2005
    Applicant: FUJITSU LIMITED
    Inventors: Keiji Watanabe, Miwa Kozawa, Shoichi Suda, Fumi Yamaguchi, Isao Yahagi, Michitaka Morikawa
  • Patent number: 6949324
    Abstract: A positive type resist composition having an alkali-soluble siloxane polymer expressed by the following Formula (1), a photosensitive compound, and a 1 ?m thick resist film formed of the positive type resist composition which has 5% to 60% of transmittance to i-line radiation; in the Formula (1), R1 and R2 express a monovalent organic group, and may be identical or different; “A” is a group expressed by the following Formula (2) having at least one phenolic hydroxyl group; and “a”, “b,” and “c” satisfy the following relation; a+b+c=1, in the Formula (2), R3, R4, and R5 express one of a hydrogen atom and a monovalent organic group, and may be identical or different, “m” expresses an integer, and “n” expresses an integer of 1 to 5. Preferably, 0.25?a?0.60, and 0?c?0.25. The composition is preferably used in a resist film undergoing oxygen plasma etching.
    Type: Grant
    Filed: December 27, 2002
    Date of Patent: September 27, 2005
    Assignee: Fujitsu Limited
    Inventors: Keiji Watanabe, Miwa Kozawa, Shoichi Suda, Fumi Yamaguchi, Isao Yahagi, Michitaka Morikawa
  • Publication number: 20030211407
    Abstract: A positive type resist composition having an alkali-soluble siloxane polymer expressed by the following Formula (1), a photosensitive compound, and a 1 &mgr;m thick resist film formed of the positive type resist composition which has 5% to 60% of transmittance to i-line radiation; 1
    Type: Application
    Filed: December 27, 2002
    Publication date: November 13, 2003
    Inventors: Keiji Watanabe, Miwa Kozawa, Shoichi Suda, Fumi Yamaguchi, Isao Yahagi, Michitaka Morikawa
  • Patent number: 5736066
    Abstract: The present invention provides an optically anisotropic film characterized in that the retardation at 80.degree. C. is 20-97% of that at 30.degree. C., and the film is made from a mixture of a transparent or semitransparent polymer and at least one liquid crystal compound, wherein the ratio of the liquid crystal compound in the mixture is 0.5-50% by weight based on the combined weight of the liquid crystal compound and the polymer, or an optically anisotropic film characterized in that the retardation at 60.degree. C. is 50-99% of that at 30.degree. C., and the film comprises a mixture of a transparent or semitransparent polymer and at least one liquid crystal compound, wherein the ratio of the liquid crystal compound in the mixture is 0.5-50% by weight based on the combined weight of the liquid crystal compound and the polymer.
    Type: Grant
    Filed: November 9, 1995
    Date of Patent: April 7, 1998
    Assignee: Sumitomo Chemical Company, Limited
    Inventors: Takanobu Noguchi, Toshihiro Ohnishi, Michitaka Morikawa, Masato Kuwabara
  • Patent number: 5474731
    Abstract: A process for continuously producing a phase retarder film or sheet comprising continuously supplying a stretched thermoplastic resin film or sheet to a heating zone in parallel with the stretching direction of the film or sheet and heating the film or sheet to a temperature not lower than the glass transition temperature of the resin while applying pressure to the surface of the film or sheet passing through the heating zone, thereby continuously subjecting the film or sheet to thermal relaxation while suppressing the expansion of the film or sheet in a direction parallel to the surface of the film or sheet and perpendicular to the stretching axis. According to the present invention, a phase retarder film or sheet having a low angular dependence of retardation can be produced continuously. By using the phase retarder film(s) or sheet(s) thus obtained as optical compensator(s), the viewing angle characteristics of liquid crystal display devices can remarkably be improved.
    Type: Grant
    Filed: April 12, 1994
    Date of Patent: December 12, 1995
    Assignee: Sumitomo Chemical Company, Ltd.
    Inventors: Michitaka Morikawa, Koji Higashi, Tadashi Shindo
  • Patent number: 5366682
    Abstract: A process for producing a phase retarder film or sheet, which comprises subjecting a stretched thermoplastic resin film or sheet to thermal relaxation at a temperature not lower than the glass transition temperature of the thermoplastic resin to shrink the film or sheet in the stretching axis direction while suppressing the expansion of the film or sheet in a direction parallel to the film or sheet surface and perpendicular to the stretching axis.
    Type: Grant
    Filed: December 9, 1992
    Date of Patent: November 22, 1994
    Assignee: Sumitomo Chemical Company, Limited
    Inventors: Michitaka Morikawa, Koji Higashi, Tadashi Shindo