Patents by Inventor Michitaka Tominaga

Michitaka Tominaga has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing a semiconductor device
    Patent number: 5981375
    Abstract: A method of manufacturing a semiconductor device includes forming an interconnection layer patterned to predetermined shapes on a semiconductor base, forming a plasma TEOS film as a first insulating layer on the surface of the interconnection layer while reducing radio frequency (RF) power, and forming an ozone TEOS film as a second insulating layer on the first insulating layer.
    Type: Grant
    Filed: July 10, 1997
    Date of Patent: November 9, 1999
    Assignee: Oki Electric Industry Co., Ltd.
    Inventors: Nobuhiro Terada, Michitaka Tominaga