Abstract: A leakage detect tool, a system and method for the testing of gas leakage from a vacuum bellows is described. The leakage detect tool has a main cylindrical pipe having an auto-stop plate at one end of the main cylindrical pipe and a main flange at the other end of the main cylindrical pipe. A secondary cylindrical pipe is attached to the side wall of the main cylindrical pipe at an angle. A secondary flange is attached to the secondary cylindrical pipe at the end opposite the main cylindrical pipe. A vacuum bellows is placed within the main cylindrical pipe, a top flange seals the vacuum bellows to the main flange, and a test gas (tracer gas) is instilled to inflate the vacuum bellows. An interior space between the vacuum bellows and the side wall of the main cylindrical pipe is evacuated by a vacuum pump that is coupled to the secondary flange. A test gas detector is coupled to the secondary flange and activated to detect the presence of the test gas in the interior space of the main cylindrical pipe.

Abstract: An improved ion implant filament assembly, including shielding and insulation spacers, is provided that reduces the unwanted metal coating between the filament ends which shorts out the filament. An important parts of the invention are ridges on a filament shield which prevent coatings between filament ends and spacer insulators between the filament shield and the stage. The invention comprises a filament having a two parallel extending leads; two screws, each having a central hole; the leads extending through the central hole; a filament shield having two spaced apertures, the spaced apertures receiving the screws from a front side; the filament shield having annular ridges on the back side; a stage having two spaced apertures and a means to fix the stage to the source chamber; two annular spacer insulators positioned between the filament shield and the stage; and two end insulators each having a central aperture adapted to received one of the screws.