Abstract: A photoresist coating device includes a liquid vaporization module and a photoresist coating module. The liquid vaporization module is for converting a liquid photoresist into a gaseous photoresist and conveying the gaseous photoresist to a photoresist coating module. The photoresist coating module comprises a vapor coating unit, a cover plate and a carrying table, in which the vapor coating unit comprises a vapor channel and a vapor spray hole, in which the vapor spray hole is provided through the cover plate; the carrying table is for loading a substrate; and the cover plate is provided on a side of the carrying table close to the substrate. The vapor coating unit acquires the gaseous photoresist through the vapor channel and conveys the gaseous photoresist to a surface to be coated of the substrate on the carrying table through the vapor spray hole to form a photoresist coating.

Abstract: A photoresist coating device includes a liquid vaporization module and a photoresist coating module. The liquid vaporization module is for converting a liquid photoresist into a gaseous photoresist and conveying the gaseous photoresist to a photoresist coating module. The photoresist coating module comprises a vapor coating unit, a cover plate and a carrying table, in which the vapor coating unit comprises a vapor channel and a vapor spray hole, in which the vapor spray hole is provided through the cover plate; the carrying table is for loading a substrate; and the cover plate is provided on a side of the carrying table close to the substrate. The vapor coating unit acquires the gaseous photoresist through the vapor channel and conveys the gaseous photoresist to a surface to be coated of the substrate on the carrying table through the vapor spray hole to form a photoresist coating.

Abstract: An applying method for an adhesive according to an embodiment includes the following steps. First, gas is exhausted from a first exhaust pipe, so as to eliminate a part of the gas in a closed container. Next, the gas continues to be exhausted from the first exhaust pipe, so as to have the adhesive in the transmission pipeline become bubbled, and also to convey the bubbled adhesive to reach the supply vent. Later, gas is exhausted from the second exhaust pipe and continues to be exhausted from the first exhaust pipe, so as to greatly exhaust the gas in the closed container, and also to increase bubbling in the adhesive. Subsequently, the gas continues to be exhausted from the second exhaust pipe and ceases to be exhausted from the first exhaust pipe, so as to cause the adhesive to reach a gasified state. Also the gasified adhesive is supplied to the closed container from the supply vent, so that the gasified adhesive can adhere to and coat above the SiO2 layer.

Abstract: An applying method for an adhesive according to an embodiment includes the following steps. First, gas is exhausted from a first exhaust pipe, so as to eliminate a part of the gas in a closed container. Next, the gas continues to be exhausted from the first exhaust pipe, so as to have the adhesive in the transmission pipeline become bubbled, and also to convey the bubbled adhesive to reach the supply vent. Later, gas is exhausted from the second exhaust pipe and continues to be exhausted from the first exhaust pipe, so as to greatly exhaust the gas in the closed container, and also to increase bubbling in the adhesive. Subsequently, the gas continues to be exhausted from the second exhaust pipe and ceases to be exhausted from the first exhaust pipe, so as to cause the adhesive to reach a gasified state. Also the gasified adhesive is supplied to the closed container from the supply vent, so that the gasified adhesive can adhere to and coat above the SiO2 layer.