Patents by Inventor Migching Wu

Migching Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integration manufacturing process for MEMS device
    Patent number: 8114699
    Abstract: A method for manufacturing an MEMS device is provided. The method includes steps of a) providing a first substrate having a concavity located thereon, b) providing a second substrate having a connecting area and an actuating area respectively located thereon, c) forming plural microstructures in the actuating area, d) mounting a conducting element in the connecting area and the actuating area, e) forming an insulating layer on the conducting element and f) connecting the first substrate to the connecting area to form the MEMS device. The concavity contains the plural microstructures.
    Type: Grant
    Filed: March 28, 2011
    Date of Patent: February 14, 2012
    Assignee: Walsin Lihwa Corp.
    Inventors: Migching Wu, Hsueh-An Yang, Hung-Yi Lin, Weileun Fang