Abstract: A vacuum deposition system comprises a vacuum vessel, an evaporation source holder located in the vacuum vessel for holding an evaporation source and a holding jig provided in the vacuum vessel for holding a substrate facing the evaporation source. An adhesion-prevention member is located at outer peripheries of the evaporation source and the holding jig along an inner wall of the vacuum vessel. The adhesion-prevention member is spaced from the inner wall of the vacuum vessel. The adhesion-prevention member includes members slanted diagonally downward from the central part toward the inner wall. Thereby, the adhesion-prevention member prevents an evaporant from the evaporation source from adhering to the inner wall of the vacuum vessel. A heater on the adhesion-prevention member heats the adhesion-prevention member to exfoliate particles that are deposited to the adhesion-prevention member.

Abstract: A vacuum deposition system comprises a vacuum vessel, an evaporation source holder provided in the vacuum vessel for holding an evaporation substance and a holding jig provided in the vacuum vessel for holding a substrate facing the evaporation source. An adhesion-prevention member is provided at outer peripheries of the evaporation source and the holding jig along an inner wall of the vacuum vessel across a region from a position facing a lateral part of the evaporation source holder to a position facing a lateral part of the holding jig. The adhesion-prevention member is spaced apart from the inner wall of the vacuum vessel. The adhesion-prevention member includes members slanted diagonally downward from the central part side toward the inner wall. Thereby, the adhesion-prevention member prevents an evaporant from the evaporation source from adhering to the inner wall of the vacuum vessel.