Patents by Inventor Mihir A. Oka

Mihir A. Oka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230238352
    Abstract: An apparatus comprising a bonding nozzle that has one or more channels in a bonding surface. The one or more channels comprise a first channel portion in an inner region of the bonding surface and a second channel portion along an outer periphery of the bonding surface. The one or more channels are in fluid communication with a vacuum port. A vacuum relief conduit within the bonding nozzle comprises a first opening into the second channel portion along the outer periphery of the bonding surface, and a second opening along an exterior wall of the bonding nozzle.
    Type: Application
    Filed: April 3, 2023
    Publication date: July 27, 2023
    Applicant: Intel Corporation
    Inventors: Mihir Oka, Kartik Srinivasan, Wei Tan, James Mellody
  • Patent number: 11652080
    Abstract: An apparatus comprising a bonding nozzle that has one or more channels in a bonding surface. The one or more channels comprise a first channel portion in an inner region of the bonding surface and a second channel portion along an outer periphery of the bonding surface. The one or more channels are in fluid communication with a vacuum port. A vacuum relief conduit within the bonding nozzle comprises a first opening into the second channel portion along the outer periphery of the bonding surface, and a second opening along an exterior wall of the bonding nozzle.
    Type: Grant
    Filed: May 27, 2021
    Date of Patent: May 16, 2023
    Assignee: Intel Corporation
    Inventors: Mihir Oka, Kartik Srinivasan, Wei Tan, James Mellody
  • Publication number: 20210288021
    Abstract: An apparatus comprising a bonding nozzle that has one or more channels in a bonding surface. The one or more channels comprise a first channel portion in an inner region of the bonding surface and a second channel portion along an outer periphery of the bonding surface. The one or more channels are in fluid communication with a vacuum port. A vacuum relief conduit within the bonding nozzle comprises a first opening into the second channel portion along the outer periphery of the bonding surface, and a second opening along an exterior wall of the bonding nozzle.
    Type: Application
    Filed: May 27, 2021
    Publication date: September 16, 2021
    Applicant: Intel Corporation
    Inventors: Mihir Oka, Kartik Srinivasan, Wei Tan, James Mellody
  • Patent number: 10546823
    Abstract: Described is an apparatus which comprises: a die having a first side and a second side opposite to the first side; a die backside film (DBF) or die attach film (DAF) disposed over the first side of the die; and a fluorocarbon layer disposed over the DBF or DAF. Described is a method which comprises: applying a die backside film (DBF) over a first side of a die, wherein the die has a second side which metal bumps; and applying a plasma polymerization process to treat the DBF with a fluorocarbon plasma.
    Type: Grant
    Filed: November 13, 2015
    Date of Patent: January 28, 2020
    Assignee: Intel Corporation
    Inventors: Balu Pathangey, Mihir A. Oka, Andrew Proctor
  • Patent number: 10515914
    Abstract: Foundation layers and methods of forming a foundation layer are described. Die pads are formed over a die. A dielectric layer is formed over die pads and the die. The dielectric layer is then recessed to expose top portions of the die pads. A first plurality of sintered conductive vias are formed over the die pads. The first sintered conductive vias are coupled to at least one of the die pads. In addition, a photoresist layer may be formed over the dielectric layer and the top portions of the die pads. Via openings are formed in the photoresist layer. A second plurality of sintered conductive vias may then be formed over the first sintered conductive vias to form a plurality of sintered conductive lines. Each of the first and second sintered conductive vias are formed with a liquid phase sintering (LPS) solder paste.
    Type: Grant
    Filed: January 29, 2019
    Date of Patent: December 24, 2019
    Assignee: Intel Corporation
    Inventors: Mihir A. Oka, Ken P. Hackenberg, Vijay Krishnan (Vijay) Subramanian, Neha M. Patel, Nachiket R. Raravikar
  • Publication number: 20190157225
    Abstract: Foundation layers and methods of forming a foundation layer are described. Die pads are formed over a die. A dielectric layer is formed over die pads and the die. The dielectric layer is then recessed to expose top portions of the die pads. A first plurality of sintered conductive vias are formed over the die pads. The first sintered conductive vias are coupled to at least one of the die pads. In addition, a photoresist layer may be formed over the dielectric layer and the top portions of the die pads. Via openings are formed in the photoresist layer. A second plurality of sintered conductive vias may then be formed over the first sintered conductive vias to form a plurality of sintered conductive lines. Each of the first and second sintered conductive vias are formed with a liquid phase sintering (LPS) solder paste.
    Type: Application
    Filed: January 29, 2019
    Publication date: May 23, 2019
    Inventors: Mihir A. OKA, Ken P. HACKENBERG, Vijay Krishnan (Vijay) SUBRAMANIAN, Neha M. PATEL, Nachiket R. RARAVIKAR
  • Patent number: 10224299
    Abstract: Foundation layers and methods of forming a foundation layer are described. Die pads are formed over a die. A dielectric layer is formed over die pads and the die. The dielectric layer is then recessed to expose top portions of the die pads. A first plurality of sintered conductive vias are formed over the die pads. The first sintered conductive vias are coupled to at least one of the die pads. In addition, a photoresist layer may be formed over the dielectric layer and the top portions of the die pads. Via openings are formed in the photoresist layer. A second plurality of sintered conductive vias may then be formed over the first sintered conductive vias to form a plurality of sintered conductive lines. Each of the first and second sintered conductive vias are formed with a liquid phase sintering (LPS) solder paste.
    Type: Grant
    Filed: December 29, 2016
    Date of Patent: March 5, 2019
    Assignee: Intel Corporation
    Inventors: Mihir A. Oka, Ken P. Hackenberg, Vijay Krishnan (Vijay) Subramanian, Neha M. Patel, Nachiket R. Raravikar
  • Publication number: 20190067213
    Abstract: Described is an apparatus which comprises: a die having a first side and a second side opposite to the first side; a die backside film (DBF) or die attach film (DAF) disposed over the first side of the die; and a fluorocarbon layer disposed over the DBF or DAF. Described is a method which comprises: applying a die backside film (DBF) over a first side of a die, wherein the die has a second side which metal bumps; and applying a plasma polymerization process to treat the DBF with a fluorocarbon plasma.
    Type: Application
    Filed: November 13, 2015
    Publication date: February 28, 2019
    Applicant: INTEL CORPORATION
    Inventors: Balu Pathangey, Mihir A. Oka, Andrew Proctor
  • Publication number: 20180315731
    Abstract: Described is an apparatus which comprises: a die with a first side; a plurality of metal bumps on the first side of the die; a plurality of solders disposed on the plurality of metal bumps; and a patterned printable resist disposed next to at least one of the solders of the plurality of solders. Described is a method which comprises: printing a photoresist ink onto a bumped wafer surface; thermally or Ultra-Violet curing the photoresist ink; and printing or electroplating solder(s) onto the bumped wafer surface. Described is a machine readable storage media having one or more instructions that when executed cause a machine to perform an operations according to the method described above.
    Type: Application
    Filed: December 4, 2015
    Publication date: November 1, 2018
    Applicant: INTEL CORPORATION
    Inventors: Kosuke Hirota, Mihir Oka
  • Publication number: 20180190604
    Abstract: Foundation layers and methods of forming a foundation layer are described. Die pads are formed over a die. A dielectric layer is formed over die pads and the die. The dielectric layer is then recessed to expose top portions of the die pads. A first plurality of sintered conductive vias are formed over the die pads. The first sintered conductive vias are coupled to at least one of the die pads. In addition, a photoresist layer may be formed over the dielectric layer and the top portions of the die pads. Via openings are formed in the photoresist layer. A second plurality of sintered conductive vias may then be formed over the first sintered conductive vias to form a plurality of sintered conductive lines. Each of the first and second sintered conductive vias are formed with a liquid phase sintering (LPS) solder paste.
    Type: Application
    Filed: December 29, 2016
    Publication date: July 5, 2018
    Inventors: Mihir A. OKA, Ken P. HACKENBERG, Vijay Krishnan (Vijay) SUBRAMANIAN, Neha M. PATEL, Nachiket R. RARAVIKAR
  • Patent number: 9859248
    Abstract: Embodiments of the present disclosure are directed to die adhesive films for integrated circuit (IC) packaging, as well as methods for forming and removing die adhesive films and package assemblies and systems incorporating such die adhesive films. A die adhesive film may be transparent to a first wavelength of light and photoreactive to a second wavelength of light. In some embodiments, the die adhesive film may be applied to a back or “inactive” side of a die, and the die surface may be detectable through the die adhesive film. The die adhesive film may be cured and/or marked with laser energy having the second wavelength of light. The die adhesive film may include a thermochromic dye and/or nanoparticles configured to provide laser mark contrast. UV laser energy may be used to remove the die adhesive film in order to expose underlying features such as TSV pads.
    Type: Grant
    Filed: June 29, 2016
    Date of Patent: January 2, 2018
    Assignee: INTEL CORPORATION
    Inventors: Danish Faruqui, Edward R. Prack, Sergei L. Voronov, David K. Wilkinson, Jr., Tony Dambrauskas, Lars D. Skoglund, Yoshihiro Tomita, Mihir A. Oka, Rajen C. Dias
  • Patent number: 9659889
    Abstract: This disclosure relates generally to generating a solder-on-die using a water-soluble resist, system, and method. Heat may be applied to solder as applied to a hole formed in a water-soluble resist coating, the water-soluble resist coating being on a surface of an initial assembly. The initial assembly may include an electronic component. The surface may be formed, at least in part, by an electrical terminal of the electronic component, the hole being aligned, at least in part, with the electrical terminal. The solder may be reflowed, wherein the solder couples, at least in part, with the electrical terminal.
    Type: Grant
    Filed: December 20, 2013
    Date of Patent: May 23, 2017
    Assignee: Intel Corporation
    Inventors: Mihir Oka, Xavier Brun, Dingying David Xu, Edward Prack, Kabirkumar Mirpuri, Saikumar Jayaraman
  • Publication number: 20170033069
    Abstract: Techniques are disclosed for protecting a surface using a dry-removable protective coating that does not require chemical solutions to be removed. In an embodiment, a protective layer is disposed on a surface. The protective layer is composed of one layer that adheres to the surface. The surface is then processed while the protective coating is on the surface. Thereafter, the protective layer is removed from the surface by separating the protective layer away from the surface without the use of chemical solutions.
    Type: Application
    Filed: October 17, 2016
    Publication date: February 2, 2017
    Inventors: Mihir A. Oka, Edward R. PRACK, Dingying XU, Saikumar JAYARAMAN
  • Patent number: 9530718
    Abstract: A die backside film including a matrix material; and an amount of filler particles to render the die backside film thermally conductive, wherein a thermal conductivity of the amount of filler particles is greater than a thermal conductivity of silica particles. A method including introducing a die backside film on a backside surface of a die, the die backside film including a matrix material including an elastomer an amount of filler particles to render the die backside film thermally conductive, wherein a thermal conductivity of the amount of filler particles is greater than a thermal conductivity of silica particles; and disposing the die in a package.
    Type: Grant
    Filed: December 26, 2012
    Date of Patent: December 27, 2016
    Assignee: Intel Corporation
    Inventors: Hitesh Arora, Mihir A. Oka, Chandra M. Jha
  • Publication number: 20160307869
    Abstract: Embodiments of the present disclosure are directed to die adhesive films for integrated circuit (IC) packaging, as well as methods for forming and removing die adhesive films and package assemblies and systems incorporating such die adhesive films. A die adhesive film may be transparent to a first wavelength of light and photoreactive to a second wavelength of light. In some embodiments, the die adhesive film may be applied to a back or “inactive” side of a die, and the die surface may be detectable through the die adhesive film. The die adhesive film may be cured and/or marked with laser energy having the second wavelength of light. The die adhesive film may include a thermochromic dye and/or nanoparticles configured to provide laser mark contrast. UV laser energy may be used to remove the die adhesive film in order to expose underlying features such as TSV pads.
    Type: Application
    Filed: June 29, 2016
    Publication date: October 20, 2016
    Inventors: Danish Faruqui, Edward R. Prack, Sergei L. Voronov, David K. Wilkinson, JR., Tony Dambrauskas, Lars D. Skoglund, Yoshihiro Tomita, Mihir A. Oka, Rajen C. Dias
  • Patent number: 9472517
    Abstract: Techniques are disclosed for protecting a surface using a dry-removable protective coating that does not require chemical solutions to be removed. In an embodiment, a protective layer is disposed on a surface. The protective layer is composed of one layer that adheres to the surface. The surface is then processed while the protective coating is on the surface. Thereafter, the protective layer is removed from the surface by separating the protective layer away from the surface without the use of chemical solutions.
    Type: Grant
    Filed: March 18, 2014
    Date of Patent: October 18, 2016
    Assignee: Intel Corporation
    Inventors: Mihir A. Oka, Edward R. Prack, Dingying Xu, Saikumar Jayaraman
  • Patent number: 9412702
    Abstract: Embodiments of the present disclosure are directed to die adhesive films for integrated circuit (IC) packaging, as well as methods for forming and removing die adhesive films and package assemblies and systems incorporating such die adhesive films. A die adhesive film may be transparent to a first wavelength of light and photoreactive to a second wavelength of light. In some embodiments, the die adhesive film may be applied to a back or “inactive” side of a die, and the die surface may be detectable through the die adhesive film. The die adhesive film may be cured and/or marked with laser energy having the second wavelength of light. The die adhesive film may include a thermochromic dye and/or nanoparticles configured to provide laser mark contrast. UV laser energy may be used to remove the die adhesive film in order to expose underlying features such as TSV pads.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: August 9, 2016
    Assignee: Intel Corporation
    Inventors: Danish Faruqui, Edward R. Prack, Sergei L. Voronov, David K. Wilkinson, Tony Dambrauskas, Lars D. Skoglund, Yoshihiro Tomita, Mihir A. Oka, Rajen C. Dias
  • Publication number: 20150270235
    Abstract: Techniques are disclosed for protecting a surface using a dry-removable protective coating that does not require chemical solutions to be removed. In an embodiment, a protective layer is disposed on a surface. The protective layer is composed of one layer that adheres to the surface. The surface is then processed while the protective coating is on the surface. Thereafter, the protective layer is removed from the surface by separating the protective layer away from the surface without the use of chemical solutions.
    Type: Application
    Filed: March 18, 2014
    Publication date: September 24, 2015
    Inventors: Mihir A. Oka, Edward R. Prack, Dingying Xu, Saikumar Jayaraman
  • Publication number: 20150179595
    Abstract: This disclosure relates generally to generating a solder-on-die using a water-soluble resist, system, and method. Heat may be applied to solder as applied to a hole formed in a water-soluble resist coating, the water-soluble resist coating being on a surface of an initial assembly. The initial assembly may include an electronic component. The surface may be formed, at least in part, by an electrical terminal of the electronic component, the hole being aligned, at least in part, with the electrical terminal. The solder may be reflowed, wherein the solder couples, at least in part, with the electrical terminal.
    Type: Application
    Filed: December 20, 2013
    Publication date: June 25, 2015
    Inventors: Mihir Oka, Xavier Brun, Dingying David Xu, Edward Prack, Kabirkumar Mirpuri, Saikumar Jayaraman
  • Publication number: 20140264951
    Abstract: Embodiments of the present disclosure are directed to die adhesive films for integrated circuit (IC) packaging, as well as methods for forming and removing die adhesive films and package assemblies and systems incorporating such die adhesive films. A die adhesive film may be transparent to a first wavelength of light and photoreactive to a second wavelength of light. In some embodiments, the die adhesive film may be applied to a back or “inactive” side of a die, and the die surface may be detectable through the die adhesive film. The die adhesive film may be cured and/or marked with laser energy having the second wavelength of light. The die adhesive film may include a thermochromic dye and/or nanoparticles configured to provide laser mark contrast. UV laser energy may be used to remove the die adhesive film in order to expose underlying features such as TSV pads.
    Type: Application
    Filed: March 14, 2013
    Publication date: September 18, 2014
    Inventors: Danish Faruqui, Edward R. Prack, Sergei L. Voronov, David K. Wilkinson, JR., Tony Dambrauskas, Lars D. Skoglund, Yoshihiro Tomita, Mihir A. Oka, Rajen C. Dias