Patents by Inventor Miho SHIRAKI

Miho SHIRAKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Through hole forming method, nozzle plate and MEMS device
    Patent number: 8623769
    Abstract: A through hole forming method includes forming a plurality of small holes in a first substrate surface of a substrate including the first substrate surface and a second substrate surface as a back surface of the first substrate surface, forming a thermally oxidized film by thermally oxidizing partition walls between the adjacent small holes and bottoms of the small holes, and removing the thermally oxidized film.
    Type: Grant
    Filed: March 1, 2012
    Date of Patent: January 7, 2014
    Assignee: Seiko Epson Corporation
    Inventors: Miho Shiraki, Junichi Takeuchi
  • THROUGH HOLE FORMING METHOD, NOZZLE PLATE AND MEMS DEVICE
    Publication number: 20120223615
    Abstract: A through hole forming method includes forming a plurality of small holes in a first substrate surface of a substrate including the first substrate surface and a second substrate surface as a back surface of the first substrate surface, forming a thermally oxidized film by thermally oxidizing partition walls between the adjacent small holes and bottoms of the small holes, and removing the thermally oxidized film.
    Type: Application
    Filed: March 1, 2012
    Publication date: September 6, 2012
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Miho SHIRAKI, Junichi TAKEUCHI