Abstract: An optical phased array is provided, including: a silicon substrate; a silicon oxide layer; an optical waveguide layer including a coupling beam splitter and a grating antenna; a silicon oxide cladding layer, disposed around the optical waveguide layer and filled in the band-shaped gap; and one or more lithium niobate phase shifters; each lithium niobate phase shifter includes: a lithium niobate thin film located in the band-shaped gap, a lithium niobate optical waveguide disposed over the lithium niobate thin film and connected to the coupling beam splitter and the grating antenna, modulation electrodes. The present disclosure uses materials with high electro-optical coefficient and low loss, such as lithium niobate, to replace thermal modulation resistors and the phase modulation mode based on carrier injection used in optical phased arrays, so that the optical phase modulation with low power consumption, high speed and low waveguide loss can be performed.

Abstract: A silicon photonic chip-based LiDAR, comprising a silicon photonic chip (2), a laser module, a beam collimator module (4), and a signal processing module (6), where the laser outputs a frequency modulated continuous laser and transmits the frequency modulated continuous laser to the silicon photonic chip (2), where the laser is split and transmitted in the silicon photonic chip (2) to form a reference interference light and a local oscillation light on the one hand, and the split laser is transmitted to the target (5) via the beam collimator module (4), and then the reflect light of the reference interference light is received to interfere with the local oscillation light to form a measurement interference light on the other hand; and the reference interference light and the measurement interference light are photoelectrically detected in the silicon photonic chip (2) and form an electrical signal being output to the signal processing module (6) to obtain the distance and speed of the target.