Abstract: The present invention relates to an integrated optical measurement device. The integrated optical measurement device includes a light source module that includes first to Nth light source units each of which irradiates light of different wavelengths to a sample (N is a natural number greater than or equal to 2), when a direction in which the light source module irradiates light is downward, a detection module that is provided above the light source module to detect a reaction of the sample, a sample unit that is provided below the light source module to fix the sample, and an angle mount that fixes the first to Nth light source units at a predetermined angle, in which the first to Nth light source units are fixedly installed around the detection module.

Abstract: A load port module includes a plate to support at least one substrate, a sensor to detect foreign matter at a predetermined location, and a cleaner to remove the foreign matter at the predetermined location when the foreign matter is detected by the sensor. The cleaner removes the foreign matter at the predetermined location in synchronism with movement of the plate. A mover to move the plate continues to operate after detection of the foreign matter by the sensor and removal of the foreign matter by the cleaner.

Abstract: A load port module includes a plate to support at least one substrate, a sensor to detect foreign matter at a predetermined location, and a cleaner to remove the foreign matter at the predetermined location when the foreign matter is detected by the sensor. The cleaner removes the foreign matter at the predetermined location in synchronism with movement of the plate. A mover to move the plate continues to operate after detection of the foreign matter by the sensor and removal of the foreign matter by the cleaner.